laser钻孔培训教材

,40,镭射钻孔培训教材,前言,LASER钻孔简介,LASER钻机介绍,Microvia制作工艺,Microvia 常见缺陷分析,目录,随着PCB向微型和高密度互连的方向发展，越来越多制板采用微导孔的连接方式实现高密度互连，而目前制作微导孔的主要方法是laser drill。如何利用现有镭射钻机制作出各种高质量的microvia，是现在PCB制造的迫切任务。,前言,1、LASER分类,100 nm,5th H,4th H,3rd H,Ar-Ion,2nd H, Nd:YAG,Nd:YAG,Nd:YAG,Nd:YAG Nd:YAG Nd:YLF,Wavelength,212 nm,266,nm,355 nm,488,nm,532 nm,1064 nm,VISIBLE,INFRARED,ULTRAVIOLET,1000 nm,10,000 nm,400 nm,750 nm,1321 nm,光谱图,Laser 钻孔简介,激光类型主要包括,红外光,和,紫外光,两种；,2、常见的LASER激发方式,Laser 钻孔简介,LASER 类型UV,激发介质YAG,激发能量发光二极管,代表机型：ESI 5320,LASER 类型 IR（RF-Radio Frequency）,激发介质密封CO2气体,激发能量高频电压,代表机型：HITACHI LC-1C21E/1C,LASER 类型 IR（TEA-Transverse excited atmospheric横波激励）,激发介质外供CO2气体,激发能量高压电极,代表机型：SUMITOMO LAVIA 1000TW,3.1、CO2的成孔原理,利用红外线的热能，当温度升高或能量增加到一定程度后，如有机物的熔点、燃点或沸,点时，则有机物分子的相互作用力或束缚力将大为减小到使有机物分子相互脱离成自由态或,游离态，由于激光的不断提供能量，而使有机分子逸出或者与空气中的氧气燃烧而成为二氧,化碳或水气体而散离去，由于激光是以一定直径的红外光束来加工的，因而形成微小孔。,Absorption,and,Heating,Thermal,Conduction,Light,Melting,Liquid,Interface,Vaporization,Plasma Production,Laser 钻孔简介,固态Nd：YAG紫外激光器发射的是高能量的紫外光光束，利用其光学能(高能量,光子)，破坏了有机物的分子键(如共价键)，金属晶体(如金属键)等，形成悬浮颗粒,或原子团、分子团或原子、分子而逸散离出，最后形成盲孔。,吸收,破坏分子(原子)键,成孔,长链大分子,小粒子逃逸,Laser 钻孔简介,3.2、UV的成孔原理,4、常见LASER的加工材料,Epoxy,FR4,ARAMID,COPPER,BT,现已加工的介质材料包括：,RCC、1X1080、2X1080、2116、2X106、ARAMID,Laser 钻孔简介,吸收率,波长 (um),Resin,Matte Cu,Glass,UV,IR,VISIBLE,0,0.1,0.2,0.3,0.4,0.5,0.6,0.7,0.8,0.9,1,0.2,0.3,0.4,0.5,0.6,0.7,0.8,0.9,1,1.1,1.2,各种材料都吸收,树脂吸收红外光强,玻璃反射,铜反射,由于不同材料对各类激光的吸收均不相同，导致LASER加工混合材料时的困难。,Laser 钻孔简介,4.1、不同材料对波长的吸收情况（2000版本）,Laser 钻孔简介,4.2、不同材料对波长的吸收情况（2001版本）,Aspect Ratio,500 450 400 350 300,250 200 150 100 50,m,m,Thru Vias,Blind Vias,10:1,1:1,.1:1,UV YAG,CO,2,Photo-via,Mechanical,Drill,5、各种方法加工孔直径的范围,Laser 钻孔简介,我司现有 Laser 钻机,HITACHI,LC-1C21E/1C,LC-2F21SE/1C,LC-2F212SE/2C,LC-2G212E/2C,LC-2G212BE/2C,SUMITOMO,LAVIA 1000TW,ESI,5320,5330,Laser 钻机介绍,ESI 5320,高频率低功率脉冲,固态激光激发装置，无须外部供气,“冷光”，产生热量少,Hitachi,RF Excited 密封气体激发,无须定期换气,每四小时需做精度校正,SUMITOMO,外部供气,须定期换气,加工时有能量检测和补打功能,ESI UV Laser对位系统1内层靶标对位,Laser 钻机介绍,UV Laser刮内层靶标图形,定位补偿方法,4 points allow correction of x - y offset, rotation, scale, and keystone,15.7 mil Through Hole,3 mil Hole,8 mil Pad,40 mil Pad,Laser 钻机介绍,ESI UV Laser对位系统2通孔对位,1.对位标靶-圆形,2.对位补偿类似ESI,Laser 钻机介绍,HITACHI &SUMITOMO,Laser对位系统,Conformal Mask靶标对位,Laser,Beam,Galvo,UV Laser,CO2 Laser,光学系统,Laser 钻机介绍,Copper surface is cleaned and textured,ESI UV Laser的钻孔参数:,Laser 钻机介绍,调整Laser焦距,Step One: Drill Copper,Step Two: Remove Dielectric,25,m,m,50 - 100,m,m,Focused spot,Small spot size,High energy density,De-focused spot,Larger spot size,Lower energy density,Stop on inner copper layer,Laser 钻机介绍,Dielectric,Copper,Planes,Punching,Dielectric,Copper,Planes,Trepanning,Spiraling,Dielectric,Copper,Planes,ESI UV Laser的钻孔参数:,Cycle Mode,Burst Mode,Step Mode,Laser 钻机介绍,Hitachi &Sumitomo Laser的钻孔参数:,即对在一个区域内所有的孔进行第一个脉冲加工，,完毕后，再进行第二个脉冲加工，如此类推。,即对一个孔进行所有的脉冲加工后，才对下个孔进行加工。,钻孔速度,HITACHImax 1200脉冲/秒,SUMITOMOmax 1000脉冲/秒,ESI 15K30K70K脉冲/秒,Laser 钻机介绍,一阶盲孔：,A、CO2 laser drill,B、CO2 laser direct drill,C、UV,direct drill,D、UV+CO2 laser drill,Microvia制作工艺,Microvia制作工艺,二阶盲孔(钻Stacked via)：,A、UV Direct drill,B、UV + CO,2,C、Conformal mask + CO,2,+UV,D、UV + Conformal mask + CO,2,五、Microvia 缺陷分析,-缺陷类型,-产生原因和影响,-解决方法,Laser Microvia缺陷分析,(1)Under Cut,(2)Delaminate,(4)Remained,Glass Fiber,(5)Remained Resin,(8)Void,(7)Damage,(6)Micro Crack,Barrel Shaped Inner Hole,Laser Microvia缺陷分析,Laser 盲孔缺陷,PROBLEMS,Under Cut,Delaminate,Cause and Effect,Heat accumulation from RCC copper surface,Impact to the RCC surface by Laser Beam,(1)Under Cut,(2)Delaminate,Laser Microvia缺陷分析,Solution,Short pulse width,Reduce the pulse energy,LASER Beam,Laser Microvia缺陷分析,PROBLEMS,Barrel Shaped Inner Hole,Cause and Effect,Reflection from hole bottom,Incorrect position of Laser mode(single,mode)to the hole,Barrel Shaped Inner Hole,Laser Microvia缺陷分析,Reflection,LASER,Beam,a,b,Single Mode,Laser Microvia缺陷分析,Solution,Short pulse(less than less),The best suited number of shots,Multi-mode Beam,Single-mode,Multi-mode,(top-flat),Laser Microvia缺陷分析,PROBLEMS,Remained Glass Fiber,Cause and Effect,Difference Nature against heat between,resin and glass,Solution,High peak power processing,Cycle-mode processing,(4)Remained,Glass Fiber,Laser Microvia缺陷分析,PROBLEMS,Remained Resin,Cause and Effect,a.Very thin smeared resin on the bottom of,hole not reach sublimation point,(5)Remained Resin,Laser Microvia缺陷分析,b. Unsuitability of resin thickness,c. Single-mode processing,60m,80m,Laser Microvia缺陷分析,d. Unsuitability of LASER pulse energy,e. Incorrect position of LASER Beam,Accuracy of XY table,Accuracy of Scanners,Alignment Accuracy against PWB elasticity,PWB warp,Laser Microvia缺陷分析,PROBLEMS,Micro Crack,Cause and Effect,The pressure from resin sublimation,by LASER,(6)Micro Crack,Laser Microvia缺陷分析,Solution,-Short Pulse(less than less),-The best suited shape of LASER wave,-The best pulse energy adapt to nature,of material,(,Standard:about 10J/cm,2,pulse width,less than 1 us,),Laser Microvia缺陷分析,PROBLEMS,Damage,Void,Cause and Effect,a.If the pulse width(irradiation time),is long, the temperature,of substrate surface is,risen up.,(8)Void,(7)Damage,Laser Microvia缺陷分析,b. Center portion of Copper foil have damage,due to Single Beam,Solution,Short,Pulse,Multi-Mode Beam,Center damage,Laser Microvia缺陷分析,The quality of Mcrovia,CO,2,Laser drill RCC,CO,2,Laser drill aramid,Laser Microvia缺陷分析,CO,2,Laser drill FR4,Laser Microvia缺陷分析,THANK YOU ！,