资源描述
Page,*,Click to edit the outline text format,Second Outline Level,Third Outline Level,Fourth Outline Level,Fifth Outline Level,Sixth Outline Level,Seventh Outline Level,Eighth Outline Level,Ninth Outline Level,Click to edit the title text format,CONFIDENTIAL,CONFIDENTIAL,晶体生长模拟FEMAG,蓝宝石生长模拟方法,FEMAG,Soft,S.A.,Belgium,A SPIN-OFF company from,Universite catholique de Louvain,BelgiumProfessor F.Dupret,CONFIDENTIAL,General introduction,Sapphire Growth,Content,CONFIDENTIAL,Introduction,For more than,25 years,FEMAG,Soft,develops simulation software dedicated to the research and development of optimal crystal growth processes.,1984,First,research on Germanium,growth in University of Louvain.Prof.Franois Dupret,1989 First,research on Silicon,growth in University of Louvain.,1992 First collaborations with major,IC,companies.,Development of,defect-free silicon,wafer production.Today,more than,35 patents,are referencing FEMAG Software,2003,FEMAG,Soft,S.A.,spin-off from University of Louvain.,2006 Collaboratrion with major,Solar,companies.,Development of,low-cost,and,low-oxygen,content processes.,2009,Large investment,for a new software framework,2010 Release of,Software application for Sapphire,ingot production.,CONFIDENTIAL,Czochralski process,CONFIDENTIAL,Directional Solidification System,CONFIDENTIAL,Floating Zone Process,CONFIDENTIAL,Sapphire Growth by CZ and kyropoulos,CONFIDENTIAL,Sapphire growth by HEM,CONFIDENTIAL,What are FEMAG software?,Process-dedicated,simulation tools,adapted to your own processes and able to solve your problems.,Global,All,the furnace components are considered.,All,the heat transfer mode are considered(radiation transfer,heat conduction,melt and gas convection),Induction and ohmic heating,Time Dependent,CONFIDENTIAL,Process-dedicated tools,FEMAG-CZ:Czochralski,FEMAG-FZ:Floating Zone,FEMAG-VB:Vertical Bridgman,FEMAG-CZ/OX:Czochralski for Sapphire,FEMAG-KY:Kyropoulos,FEMAG-DS:Directional Solidification,FEMAG-HEM:Heat Exchange Method,Gain of time.Process mastering,Accurate and right to the point,CONFIDENTIAL,Platform oriented,FRAMEWORK:FEMAG3,RADIATION,CONVECTION,MESH,GEOMETRY,CONDUCTION,FEMAG-CZ,FEMAG-HEM,FEMAG-DS,FEMAG-KYROPOULOS,FEMAG3 NEW 2011,Very,accurate:,Finite Element and Spectral methods,Very,efficient:,3D simulations in less 1 day,Very,flexible:,Very fast development of new demand,CONFIDENTIAL,Global simulations,Czochralski Furnace for Silicon,HEM Furnace for Sapphire,No simplification of the process conditions,CONFIDENTIAL,Dynamic simulations,A,dynamic,simulation tool,Complete process simulation,Dynamic effect of interface deformation,Varying processing conditions,CONFIDENTIAL,Sapphire Crystal Growth Simulation,CONFIDENTIAL,Sapphire Simulation Objective,The market of,Sapphire,is experiencing a very,fast growth rate,and become very competitive,Many companies invest in simulation software in order to reinforce their positions,HEM,Czochralski,and,Kyropoulos,process require,optimization,and a good understanding,Strong need for,efficient,numerical tools.,Radiation,effects in the participating crystal and melt is a complex problem.,CONFIDENTIAL,Sapphire Simulation Objective,Our goal is to provide,accurate,simulation tool,able to take all the process features into account and to,optimize,the growth,process in terms of the resulting,crystal quality,.,CONFIDENTIAL,Sapphire Simulation Objective,KYROPULOS,CZOCHRALSKI,HEM,CONFIDENTIAL,FEMAG-CZ/OX,FEMAG-CZ/OX Software to simulate Sapphire Growth by CZ and Kyropoulos,Specifications:,Temperature,in the sapphire and,in,all furnace components,by solving the global heat transfer in the furnace(radiation,conduction,convection).,Flow velocity,in the sapphire liquid phase.,Crystallization front shape,Ohmic,and,Induction Heating,Advanced radiation heat transfer,in the sapphire,Gas convection,Anisotropic thermal stresses,in the crystal,CONFIDENTIAL,Temperature in the Hot Zone,FEMAG-CZ/OX,CZ processwith Induction Heating system,Induction Heating system,CONFIDENTIAL,Temperature in the crystal and in the melt,FEMAG-CZ/OX,CZ processwith Induction Heating system,CONFIDENTIAL,Melt velocity amplitude,FEMAG-CZ/OX,CZ processwith Induction Heating system,The interface shape and position,is a result of the simulation,FEMAG,Soft,2012,Temperaturefield in the melt,Streamfunction,FEMAG-CZ/OX/CZ and KYROPOULOS process,FEMAG,Soft,2012,Melt meshes,BLM(boundary layer mesh),Coarse,mesh,BLM mesh is very important to simulate the interface,FEMAG,Soft,2012,Local temperature field,Result using coarse mesh,Result using BLM mesh,BLM mesh enables a,better prediction of the,crystalisation interface,FEMAG,Soft,2012,Velocity field,Result using coarse mesh,Result using BLM mesh,CONFIDENTIAL,FEMAG-HEM,FEMAG-HEM Software to simulate Sapphire Growth by Heat Exchange Method,Specifications:,Temperature,in the sapphire and,in,all furnace components,by solving the global heat transfer in the furnace(radiation,conduction,convection).,Flow velocity,in the sapphire liquid phase.,Crystallizati
展开阅读全文