爱德华scrubber高处理量

The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS Product range overview 2 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS range Combustion abatement combined with wet scrubbing stages Suitable for Etch applications Low CoO, user friendly solution Excellent reliability on harshest processes PFC gas abatement capability The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS Construction 4 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS Layout All utility connections at top All electrics housed in front-accessible section Touch-sensitive colour screen Inlet pipework design avoids powder & liquid trapping Hydro-cyclone: self-cleaning water filtering device Easily accessible heat exchanger and water pumps Use of CPVC components, large diameters minimise risk of blockage Everything housed in a single cabinet Integral drip-tray CPVC is a FM-approved flame-retardant plastic 5 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Gas path Water Untreated process gas Combustion by-products Detoxified gas Fuel + Air The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS Combustion section 7 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Inlets L-shaped pipe work Avoid blockage by solid/liquid by-products Up to 6 inlets TMS option available Inlet temperature control Avoid by-products condensation 8 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Combustion section Initial gas treatment: combustion Oxidation of deposition gases SiH4 + O2 SiO2 + 2H2O Reduction of clean gases (NF3, F2) 2F2 + CH4 + O2 4HF + CO2 Anti-clogging inlet head Inward fired combustor Porous ceramic construction Excellent corrosion resistance Proven powder handling Safe (leak-proof, cold outer wall) ATLAS Inlets Pneumatic actuators Springs Inlet Head Self Cleaning Mechanism Inlet nozzle 10 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Combustor 150mm 150mm 11 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Combustor: Inward fired combustion Fuel gas + Air Process gas Flame-less, low temperature combustion 12 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Benefits 1: Uniform temperature Flame-less combustion Combustion at the wall Heat radiation to the center Low temperature 800oC Low NOx emissions ( 180 C GAS TEMP. 1150oC QUENCH TEMP. 80oC DRAIN LEVEL HIGH FUEL/AIR PRESS. +3”wg FUEL/AIR TEMP. 150 C N2 pressure 2” wg SYSTEM WARNING output attention required SYSTEM ALARM immediate system shutdown FLAME DETECTOR QUENCH WATER Flow 12 psi (TPU and Kronis versions only) FUEL PRESSURE. 60 C COMBUSTOR PRESSURE Cabinet extraction pressure +0.4”wg INLET TEMPERATURE 170C WEIR TEMP. 80oC COMBUSTOR WALL TEMP. 70oC PACKED TOWER WATER Flow 8 slm WATER PRESSURE 2 bar gauge The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS installed base Since 1994 26 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 Inward-fired combustor installed base ATLAS use the Inward-fired combustion technology Expertise gained with the TPU range Used in semiconductor fabs since 1994 Over 3000 systems installed worldwide Major users and OEM Intel, IBM, Ti, Micron UMC, PSC, Winbond, AUO, CMO Elpida, TTi, NEC, Hitachi, Sony TECH, HNS ST, Infineon, Atmel SMIC Novellus, ASM, AMAT, TEL, Kokusai, Jusung 27 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS over 400 systems to date UMCi (Singapore) Installed since December 2006 UMC12A (Taiwan) Installed since November 2006 Kwanjyu-nano (Korea) Installed June 2007 Rexchip (Taiwan) CMO (FPD Taiwan) Tianma(Chendu,Wuhan) GSMC 28 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS Cost Of Operation 29 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007 ATLAS TPU Technical Data