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无 锡 职 业 技 术 学 院毕业设计说明书（英文翻译）原文The 21stCenturys Silicon microelectronics1IntroductionLooking at the development of human society in the history of civilization, all the production mode and lifestyle of the major and new technologies have caused, science and technology as revolutionary force, and promote the development of human society. More than 50 years ago from the invention of the transistor to the current microelectronics technology to become the basis of the information society and the historical development of the core fully proved that science and technology are the primary productive forces. Information is objective things state and the characteristics of a universal movement forms, together with the materials and energy is an important resource for human society, but its use is just the beginning. Currently facing the information revolution to digitalization and networking as a feature. Digital has greatly improved the peoples access to information, and better meet the peoples demand for information, and network makes it more convenient for people to exchange information so that the entire planet into a global village. To the digital and network characteristics of information technology into the same general technical different, it is highly permeable and infrastructure, it can infiltrate and transform the various industries and sectors, changes in the production and human lifestyles, changing economic patterns and the social, political, cultural and other fields. And it is one of the foundations of microelectronics technology. It is no exaggeration to say that no progress in microelectronics technology, it is impossible today the vigorous development of information technology, microelectronics has become a cornerstone of the development of the information society.For more than 50 years history of the development of microelectronic technology is, in fact, the process of continuous innovation, including innovation here refers to the original innovation, technological innovation and application of innovation. The invention of the transistor is not an isolated carefully designed experiment, but rather a series of solid physics and semiconductor physics, materials science major breakthrough was achieved after the inevitable result. 1947 point-contact transistor invention, in 1948 invented junction field effect transistor and the subsequent silicon planar technology, integrated circuits, CMOS technology, semiconductor random access memory, CPU, non-volatile memory, such as the microelectronics field of the invention are also a series of major innovation results manifest. At the same time, each of the major inventions are also open up a new field, has brought new huge market for our production and lifestyles have had a significant impact. It is precisely due to the field of microelectronics technology innovation can make microelectronic integrated able to quadruple every three years, features smaller times the speed of sustainable development for decades. Since 1968, and silicon technology-related theses and has already surpassed the number of steel-related academic papers, the view was expressed that, after 1968 following the mankind enters the stone, bronze, iron age after the era of silica (silicon age).Therefore we can say is the essence of social development innovation, there is no innovation, the community can only be imprisoned in the super-steady-state trap. Although innovation as a driving force for economic development in the reform of the community will often creativdestruction, but after this destruction, will start at a new higher level of innovation cycle, society is in such spiral of the way forward.In the microelectronics technology development for the first 50 years, innovation has played a decisive role in the future, the development of microelectronics technology will depend on the outcome of a series of innovative emerging. We believe that: At present, microelectronic technology has been developed to a very critical period, the first half of the 21st century, which is the next 50 years the development of microelectronics technology trends and the major innovation mainly in the following four aspects: to silicon-based CMOS circuits as the mainstream technology; system-on-chip (System On A Chip SOC) for the development focus of quantum electronic devices and molecules (atoms) self-assembly of nano-technology-based e-learning with other disciplines with the birth of new technology growth points, such as MEMS, such as DNA Chip.221 century will continue to the first half of the silicon-based CMOS circuits of the mainstreamMicroelectronics technology development goal is to continuously improve the performance of the system integration and cost-effective, and therefore call for an increase in chip integration, which is constantly shrinking semiconductor devices feature size power source. To MOS technology as an example, narrowing the channel length can increase the speed of integrated circuits; at the same time narrowing the channel length and width can be reduced device size, integration, the chip integrates a greater number of transistors, the structure will be more complicated, Performance improved in the electronic system integration on a single chip; In addition, with the enhancement of integration, the systems speed and reliability have also greatly improved, a sharp price drop. The on-chip signal delay of less than the signal delay chip, so the device smaller, even if the device itself does not enhance performance, the performance of the integrated system can be greatly improved. Since the invention of the integrated circuit in 1958, in order to enhance the performance of electronic systems, reduce costs, and microelectronic devices feature size is shrinking, continuously improve processing accuracy, and the silicon area escalating. The development of integrated circuit chips basically followed the Intel co-founder of the Gordon E. Moore predicted by Moores Law in 1965, that is, every three years of integration increased four times, feature smaller times. During this period, although there are many who predict this trend will slow, but the development of the microelectronics industry for more than 30 years the situation confirmed Moores prediction 2. And according to our projections, the development of microelectronic technology of this trend will continue in the 21st century, a period of time, it is any other industry can match the. 360毕业设计网 Now, 0.18-micron CMOS process technology in the microelectronics industry has become a mainstream technology, 0.035 and 0.020 micron micron device has been successful in the laboratory preparation, research work has entered the sub-0. 1-micron technology stage, the corresponding gate oxide thickness of only 2.0 to 1.0 nm. It is estimated that by 2010, the feature size of 0.05 to 0.07 microns 64 GDRAM products will be in production. The 21st century, at least the first half of the 21st century, microelectronics production technology will continue to reduce the size of the silicon-based CMOS process technology into the mainstream. Although micro-electronics and other compounds in the research of new materials made a lot of progress, but not replace silicon-based technology with the conditions. According to the laws governing the development of science and technology, from the birth of a new technology to become a mainstream technology generally require 20 to 30 years, silicon integrated circuit technology since the invention of transistors in 1947 invention of the integrated circuit in 1958 to the late 1960s also develop into a major industry after more than two decades of time. In addition, around the world in trillions of dollars in equipment and technology, has been a very powerful silicon-based technology industry capacity; At the same time, long-term research and development investments have been causing people to silicon and its derivatives to various attributes of a very in-depth understanding of very thorough state, as more than 100 kinds of natural elements, the most This is a very valuable accumulation of knowledge. Industry capacity decisions and the accumulation of knowledge of the silicon-based technology will be at least 50 years still play an important role, people will not give up easily. At present, many people think that when the feature size of microelectronics technology in 2015reached 0.030 0.015 microns, limit, the silicon technology will be the end of the era, and this is actually a misunderstanding. Leaving aside the microelectronics technology in addition to representatives of feature size of the processing technology, but alsodesign, system architecture, and other aspects of the strong need for further development of these technologies will enable the development of the microelectronics industry to continue its rapid growth. Even the processing technology, many well-known in the microelectronics experts also predicted that the microelectronics industry will be like in 2030 about entering the auto industry, the aviation industry, this relatively mature Chaoyang industrial fields. Even if the microelectronics industry into the automotive, aerospace and other industrial sectors mature, it will continue to maintain a rapid development trend, like automotive, aerospace industry has developed more than 50 years is still the same great development potential.With the device feature size is getting smaller and smaller, will inevitably encounter device structure, the key technology, integration technologies and materials in a series of problems, the reason is mainly: The laws of physics, and other scientific awareness of the problem also remain in the birth and development ofintegratedcircuits formed by the early classical or semi-classical theory on the basis of these theories to describe micron for the microelectronics devices, but the space for nano-scale magnitude and spatial scales of the order of femtosecond of the new system-on-chip device is difficult to apply in the material system, the SiO2 gate dielectric material, polysilicon / silicide gate electrode, and other traditional materials due to the material properties of the constraints, have failed to meet the 50-nanometer devices and circuits in demand At the same time the structure of the traditional devices have failed to meet the 50-nanometer devices, we must develop a new type of device structure and micro-machining, interconnection, and integration of key technology. Specific needs innovation and the development of key areas, including: Based on quantum physics and mesoscopic semiconductor devices based on the transport theory, the device model, simulation and simulation software, the new device structure, high-k gate dielectric material and a new gate structure, and electron beam stepper, 13 nmEUV lithography, etching ultrafine lines, SOI, GeSi / Si, and other silicon-based technology compatible with the new circuit, and low-K dielectric Cu interconnect devices and nanotechnology and quantum electronic devices and the integration of technology .3system-on-chip (System On A Chip) is a 21st century focus on the development of microelectronic technologyIn the integrated circuit (IC) the early stage of development, circuit design are from the physical layout device start later in the unit for integrated circuits (Cell-Lib), made from the device-level integrated circuit design into the logic level, the design of such a large number of circuit and logic designers can directly participate in the design of integrated circuits, and greatly promote the development of the IC industry. But IC is only a semi-finished, it only complete machine system can be put into play its role. IC chip through the printed circuit board (PCB) techniques to achieve complete machine system. Although the IC can be very high speed, power consumption can be very small, but because of PCB board connection between the IC chip delay, PCB board reliability and weight and other factors, complete machine system performance by a lot of restrictions. With the system to the high-speed, low-power, low-voltage and multi-media, network, and the development of mobile, the system of the increasingly high demands of the circuit, the traditional integrated circuit design technology has been unable to meet the increasing performance of the complete machine system requirements . At the same time, IC design technology and the level of integrated circuit scale is growing, becoming more complex, the whole system can be integrated into a single chip. Now can be integrated in a chip 108-109 transistors, and along with the development of microelectronics manufacturing technology, the 21st century microelectronics technology from the current 3 times the progressive development of G T to 3 times (that is, by the G-storage development T-bit, integrated circuit devices from the speed of light to the development of THz GHz, the data transfer rate from Gbps development Tbps, Note: 1 G = 109,1 T = 1012, bps: median per-second data transmission). It is in traction and technology-driven demand for the dual role, there will be a system-wide integrated microelectronics chip system-on-chip (System On A Chip, or SOC) concept. System-on-Chip (SOC) integrated circuits (IC) design idea is different, it is the field of microelectronics design a revolution, and integrated circuits, and then the relationship between the IC and discrete components similar to the relationship, its micro - Electronics role in promoting inferior since the late 1950s with the rapid development of integrated circuit technology.SOC is from the perspective of the whole system, a mechanism for handling model algorithm, the chip architecture, the circuit level until the devices are designed to closely integrate, in a single (or a few) chip to complete the function of the system as a whole, it must be designed Behavioral system from the beginning of top-down (Top-Down). Many studies show that the system and IC components compared to SOC design as integrated and holistic consideration of the various situations throughout the system, in the same process technology to achieve better performance under the conditions of the target system. For example, the use of methods and SOC 0.35 m system-on-chip design technology, the complexity of the systems in the same degree and handling rate, equivalent to a 0.18 to 0.25 m IC production process achieved by the same system performance; Also, using conventional IC chip design method compared with SOC design methodology required to perform the same function of the number of transistors can be reduced about l 2 orders of magnitude. The system-on-chip (SOC) development, there are three key technical support.(1) hardware and software co-design technology. Different systems for the hardware and software functional theory (Functional Partition Theory), where the system involves many different computer systems, communications systems, data compression and encryption and decryption of compression systems. (2) the issue of IP module. IP has three modules, namely, soft core, the main function is described solid nucleus, mainly for structural design; and hard core, based on the physical design process, and process-related, and tested through the process. A hard core of the highest value. CMOS CPU, DRAM, SRAM, Flash Memory and E2PROM and A / D, D / A, and so can be a hard core. In particular, based on the new deep submicron device and circuit simulation model, based on the speed and on the optimization of power and have the greatest tolerance of the most valuable module. Now, the Silicon Valley in the 1980s without a production line (Fabless) companies on the basis of the late 1990s and there have been some not-chip (Chipless) company, specialized sales IP module.(3) the interface module integrated analysis technology, which includes IP module of the glue logic technology (glue logic technologies) and IP modules and the realization of comprehensive analysis technology. Technologies change from the IC to the SOC is not only a conceptual breakthrough, but also the development of new information technology milestone. Through the above three support technology innovation, it will certainly lead to another system-on-chip-based information technology revolution. At present, the SOC technology has emerged, and the 21st century will be the SOC technology truly a period of rapid development. In the area of next-generation system-on-chip, the need for breakthroughs in key areas of innovation, including the realization of the main features of the algorithm and system structure of the circuit two aspects. In the history of the development of microelectronic technology, each of the proposed algorithm will lead to a transformation, such as the Viterbi Algorithm, wavelet transform and so on the development of integrated circuit design technology has played a very important role, neural networks, fuzzy Algorithms are also likely made great breakthroughs. A new structure of the circuit can lead a series of applications, but proposes a new algorithm which can motivate a new area, it should be in the future algorithm research in the field of system-on-chip one of the key disciplines. In the structure of the circuit, in the system-on-chip, since the RF, memory addition, the circuit structure which is not the traditional sense of the CMOS structure, it was necessary to develop a more nimble structure of the new circuit. In addition, in order to achieve the glue logic (Glue Logic) new logic array technology is expected to be rapid development in this system also needs to be done in-depth research.4ConclusionMicroelectronics in the development of the first 50 years of innovation and basic research has played a crucial and decisive role. As device feature size reduction, the emergence of nano-electronics, the development of a new generation of SOC, MEMS and the rise of DNA chips, and put forward a series of new issues, is an objective demand, calls the outcome of the birth of innovation. Looking back at the 20th century, after 50 years, the 21th century ago 50, 100 years of scientific and technological development of microelectronics, we feel deeply that the microelectronics technology at the turn of the century for us is a major opportunity, but also a serious challenges, and if we are able to seize this opportunity, based on innovation, to be bold in taking up this challenge, it is possible that Chinas microelectronics technology to achieve rapid growth, a new generation of microelectronics technology have their own intellectual property rights, the promotion of Chinas microelectronics industry development, and to greet the middle of the 21st century will be the arrival of the great national rejuvenation lay the technical foundation for the Chinese nation to Recasting the brilliant! 译 文 21世纪的硅微电子学1、引言 综观人类社会发展的文明史，一切生产方式和生活方式的重大变革都是由于新的科学发现和新技术的产生而引发的，科学技术作为革命的力量，推动着人类社会向 前发展。从50多年前晶体管的发明到目前微电子技术成为整个信息社会的基础和核心的发展历史充分证明了“科学技术是第一生产力”。信息是客观事物状态和运 动特征的一种普遍形式，与材料和能源一起是人类社会的重要资源，但对它的利用却仅仅是开始。当前面临的信息革命以数字化和网络化作为特征。数字化大大改善 了人们对信息的利用，更好地满足了人们对信息的需求；而网络化则使人们更为方便地交换信息，使整个地球成为一个“地球村”。以数字化和网络化为特征的信息 技术同一般技术不同，它具有极强的渗透性和基础性，它可以渗透和改造各种产业和行业，改变着人类的生产和生活方式，改变着经济形态和社会、政治、文化等各 个领域。而它的基础之一就是微电子技术。可以毫不夸张地说，没有微电子技术的进步，就不可能有今天信息技术的蓬勃发展，微电子已经成为整个信息社会发展的基石。 50多年来微电子技术的发展历史，实际上就是不断创新的过程，这里指的创新包括原始创新、技术创新和应用创新等。晶体管的发明并不是一个孤 立的精心设计的实验，而是一系列固体物理、半导体物理、材料科学等取得重大突破后的必然结果。1947年发明点接触型晶体管、1948年发明结型场效应晶 体管以及以后的硅平面工艺、集成电路、CMOS技术、半导体随机存储器、CPU、非挥发存储器等微电子领域的重大发明也都是一系列创新成果的体现。同时每一项重大发明又都开拓出一个新的领域，带来了新的巨大市场，对我们的生产、生活方式产生了重大的影响。也正是由于微电子技术领域的不断创新，才能使微电 子能够以每三年集成度翻两番、特征尺寸缩小倍的速度持续发展几十年。自1968年开始，与硅技术有关的学术论文数量已经超过了与钢铁有关的学术论文，所以 有人认为，1968年以后人类进入了继石器、青铜器、铁器时代之后硅石时代（silicon age）1。因此可以说社会发展的本质是创新，没有创新，社会就只能被囚禁在“超稳态”陷阱之中。虽然创新作为经济发展的改革动力往往会给社会带来 “创造性的破坏”，但经过这种破坏后，又将开始
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