高精密研磨机操作手册

MASMODEL: MASInstruction ManualTDK CORPORATIONMechatronics DivisionTable of ContentsAbout Warning and CautionsA-1Warning and CautionsA-5 A-71.Operation Overview5-11.1Operation transition diagram5-21.2Program menu screen5-32.Operation Switches5-42.1Switch group 15-52.2Switch group 25-62.3Switch group 35-72.4Stop switch5-82.5Switch group 55-92.6Switch group 65-103.Machine Constants and Manual Operations5-143.1Changing the machine constants5-143.2Machine constants5-143.3Machine constant range5-193.4Manual operation: X-axis5-203.5Manual operation: Y-axis5-203.6Manual operation: Z-axis5-213.7Manual operation: q-axis5-223.8Manual operation: M-axis5-224.Automatic Operation5-234.1UNLOAD5-234.2SETUP5-244.3TEST cut5-244.4AUTO5-245.Flexible Program5-255.1Programming5-255.2Altering flexible mode programs5-275.3Explanation of flexible mode resources5-285.3.1Table feed (1)5-285.3.2Table feed (1)5-295.3.3Table feed (2)5-305.3.4Timer5-315.3.5Loop start/end 15-325.3.6Loop start/end 25-335.3.7Switch group5-345.3.8Jump5-355.3.9Conditional jump5-365.3.10Conditional jump5-375.3.11Measurement5-385.3.12Seesaw5-385.3.13Measurement + IX5-395.3.14Auto focus5-395.3.15Message5-405.3.16Counter clear5-405.3.17Cycle stop5-405.3.18X, Y, M STEP (G) & Memory5-405.3.19END, TEST CUT END5-405.3.20X, Y, Z STEP5-415.3.21Reading the M-axis height & depth5-415.3.22Flag data5-425.3.23Flag conditional jump5-425.3.24Multiplication5-425.3.25Reading Y (touch wrap) and positioning5-425.3.26Resource numbers5-445.4Flexible mode Description5-486.Checking the Automatic Table5-497.Floppy Disk Operation5-507.1Writing in the floppy disk5-507.2Reading from the floppy disk5-517.3Writing the flexible data5-518.Changing the Mode5-528.1Adjusting the video board5-528.2Changing the RS-232C constants5-528.3Changing the process condition output5-528.4Changing the display mode5-528.5I/O test5-528.6SCROLL5-538.7MEASURE SYSTEM5-538.8CHANGE VIDEO DATA5-538.9ALIGNMENT PATTERN5-558.10DOT (CUT)5-558.11DOT (MARK, MIN)5-558.12DOT (MARK, MAX)5-558.13MIN WIDTH5-558.14MAX WIDTH5-558.15LENS MAG.5-568.16X ALIG. SPC5-568.17Y ALIG. SPC5-568.18IX ERROR SPC5-568.19Y POSITION ADJUST5-568.20R ADJUST SPC5-569.Measurement and Others5-579.1Measuring and saving the cut surface5-579.2Checking the standard data (Not available for PC Image Processing)5-579.3Measuring the width (Not available for PC Image Processing)5-589.3.1Measuring the width (1)5-589.3.2Measuring the width (2)5-589.4Measuring and saving the cut surface5-599.5Checking the cut surface5-599.6Manual measurement5-599.7Blower test5-599.8Checking the LS5-609.9Checking the machine constants5-609.10Checking the program version5-619.12Flash mark5-629.13Manual focus5-629.14Intermediate tank5-6210.Processing Program5-6310.1Test-Cut method (CHOP grooving)5-6310.2Terminology5-6410.3Operation sequence5-68Notice Item-10 (5-6368) is applicable to MAS-1A,-1B(with PM function),-1C,2A(with PM function) and 2B (not available for other models).Other items are applicable to all models.Store this manual in a location easily accessible to relevant personnel.If the manual becomes lost or damaged, promptly order a replacement copy.04-WB5921 3/3715000891.Operation OverviewThe system may be in either machine or program mode. When the power is turned on or the system has been stopped in an emergency, the system changes to machine mode.You can manually operate the axes (X, Y, Z, q and M) and run the system automatically from the automatic program in machine mode.1.1Operation transition diagramYou can change the machine constants and load the automatic program in program mode.1.2Program menu screenTo change from machine to program mode, press the key. You can select an item on this screen (main menu) to change the constants or load the automatic program.Initial screen2.Operation Switches+Operation panel2.1Switch group 1For turning ON/OFF the power For turning ON/OFF the spindle motor NoteIf the cover is open, the spindle motor cannot be activated.For turning ON/OFF the coolant For turning ON/OFF the vacuum All of these switches are toggle switches, so each time they are pressed they are turned from OFF to ON, or vice-versa. When a switch is ON, the LED in its top left-hand corner lights up. These switches can be operated at any time. However, if they are operated during auto operation, the machine will stop.2.2Switch group 2X table(Right/left table)Y table(Forward/backward table)Z table(Up/down table)q table(Rotation table)M table(Microscope table)Pressing a button turns on the function. If you press a button (ON), the upper left LED turns on and the corresponding axis changes to pulsar mode. If you rotate the pulser in the pulser mode, the axis moves. If you press a button (ON) and press a direction switch (see next page), the corresponding axis moves in the specified direction.2.3Switch group 3Direction switch 1Direction switch 2These are toggle switchesevery time you press a switch, the switch turns on or off. If a switch has been turned on, the upper left LED turns on.HIGH/LOW switch This switch changes the pulser axis speed. You can specify the speed for each axis by setting a value in the motor constant.2.4Stop switchPressing this switch changes the modes: Automatic operation Pulser mode JOG mode Stop mode.This switch behaves differently depending on when it is pressedthat is, while the cycle has been stopped or otherwise.1.If this switch is activated while the machine is running:The motors (X, Y, Z, q and M) stop. The blower stops.The microscope lamp turns off.The spindle motor, grinding fluid, vacuum do not change.The characters and cursor are erased on the screen except when the switch is activated for the first time after an abnormal termination or after a standard measurement.2.If this switch is activated after the machine has been cycle-stopped:Same as 1 above except the microscope lamp does not turn off.2.5Switch group 5Runs the machine automatically according to the currently programmed automatic mode. The details on the automatic operation program are described in the Program Method in Flexible Mode section.Stops (cycle-stop) the machine that is automatically running. Pressing the switch resumes the following operation.The details on the cycle-stop are described in the Program in Flexible Mode section.Moves the grindstone to the machine origin.The machine origin is a location where the distance between the table surface and the grindstone is about 90mm.Moves the grindstone from the process origin to the machine origin.Start conditions:After the unload operation.After the automatic operation mode set.If the mode is the flexible mode, the Z-axis operation command has already been entered in the program.The process origin is computed from the grindstone diameter and the jig height and is at a position where the distance from the bar surface to the grindstone periphery is 2mm.This switch is not programmed.This switch is not programmed.This switch is not programmed.2.6Switch group 6Switches the mode between the machine mode and the program mode.0 9 & .(Ten-key)Numeric keys to enter data. (Some key combinations with the * key are also used.)Cancel key. You can cancel entered data by pressing this key.Enter key. You enter the data into the system by pressing this key.+You can enter a negative value by pressing this key. (This key is a toggle switch; every time you press this key, the + and setting changes.)=UNLOAD screen=SET UP screen* + 7 screen+/-FunctionDetails0Cut surface memory9.11Standard measurement9.22Marker width measurement9.33Width measurement (2 times)9.345Cut surface check9.56Blower test9.77LS data display9.88Machine status display9.109Floppy disk read7.2.Vertical cursor modeCEHorizontal cursor modeMachine mode+/-FunctionDetails0Start, Interlock-cancel10.112345678Machines internal constant display9.99Machine initializationProgram mode+/-FunctionDetails0Flexible table deletion5.21Flexible Add mode5.22Flexible Insert mode5.23Flexible Delete mode5.24Operation table scroll - DOWN5.15Resource table scroll - DOWN5.16Resource table scroll - UP5.17Operation table scroll - UP5.189Program endProgram modeAutomatic mode selection3.Machine Constants and Manual Operations3.1Changing the machine constantsYou can change the machine constants, e.g., table moving speed (X/Y/Z/q/M), rise/fall time and display method.Change the constants as follows:Press thekey.Press thekey.Figure 5-10 shows the screen. Select a table No. to change. Figures 5-11 through 5-15 show the screens for those axes.3.2Machine constantsSLOW UP/DOWNDetermines the rise/fall time when you start the motor in a JOG operation or automatic operation.LOW SPEEDDetermines the motor start-up speed and the speed immediately before stopping.HIGH SPEEDDetermines the motor speed in the JOG operation. If you have selected 7 for the connector in the automatic program, this constant with the value set here is used.INDICATIVE MODESwitches the motor status screen (13).1Moving speed per minute.2Relative position display. Pressing the key resets this to 0.3Absolute position display. An absolute position is defined so that the X-axis is 0 at the right LS; the Y-axis is 0 at the rear LS; the Z-axis is 0 at the top LS. This does not apply to the q and M axes.Figure 5-10 Changing the motor constants Motor selectionFigure 5-11 Changing the X-motor constantsFigure 5-12 Changing the Y-motor constantsFigure 5-13 Changing the Z-motor constantsFigure 5-14 Changing the q-motor constantsFigure 5-15 Changing the M-motor constantsPULSER LOW MAG.Moving distance for 1 pulse. (The key has been set to LOW (LED: Off) and the mode is the pulser mode.)PULSER HIGH MAG.Moving distance for 1 pulse. (The key has been set to HIGH (LED: On) and the mode is the pulser mode.)BACKLASHWhen the motor direction is changed, the amount set here will be added.TEMPERATURE (only for Y-axis)Compensation for the Y-axis moving distance. The value set here will be added/subtracted for every 100mm movement.Z ORG. FIRST (only for Z-axis)MAS does not have the Z-axis origin (HOME POSITION) sensor. The UNLOAD operation moves the axis to the upper-limit LS and from there it determines the UNLOAD position. The value set here is the distance that the axis initially moves down from the upper-limit LS at the fastest speed.Z ORG. FINISH (only for Z-axis)In the UNLOAD operation, if the system detects a Z-motor ZERO signal, it further lowers the axis for the distance set here. The value set here further adjusts the position.3.3 Machine constant range3.4Manual operation: X-axisPress thebutton.If you operate the pulser after pressing the button, the X-axis moves left or right following the pulser rotation. If you press the switch at this time, the X-axis runs in the fast speed mode.If you press the switch after pressing the button, the X-axis moves fast to the left.Pressing the button again, the X-axis stops.Similarly, if you press the button, the X-axis moves to the right.You can press an arrow key and press the key to stop the X-axis.3.5Manual operation: Y-axisPress the button.If you operate the pulser after pressing the button, the Y-axis moves forward or backward following the pulser rotation. If you press the switch at this time, the Y-axis runs in the fast speed mode.If you press the switch after pressing the button, the Y-axis moves fast to the forward.Pressing the button again, the Y-axis stops.Similarly, if you press the button, the Y-axis moves to the backward.You can press an arrow key and press the key to stop the Y-axis.3.6Manual operation: Z-axisPress thebutton.If you operate the pulser after pressing the button, the Z-axis moves up or down following the pulser rotation. If you press theswitch at this time, the Z-axis runs in the fast speed mode.If you press the switch after pressing the button, the Z-axis moves down fast.Pressing the button again, the Z-axis stops.Similarly, if you press the button, the Z-axis moves up.You can press an arrow key and press the key to stop the Z-axis.3.7Manual operation: q-axisPress thebutton.If you operate the pulser after pressing the button, the q-axis moves up or down following the pulser rotation. The q-axis always moves slowly regardless of the switch setting.If you press the switch after pressing the button, the q-axis rotates clockwise fast.Pressing the button again, the q-axis stops. The speed is defined in section 3.3.Similarly, if you press the button, the q-axis rotates counterclockwise.You can press an arrow key and press the key to stop the q-axis.3.8Manual operation: M-axisPress the button.If you operate the pulser after pressing the button, the microscope lens moves up or down following the pulser rotation. The M-axis always moves slowly regardless of the switch setting.If you press the switch after pressing the button, the M-axis moves up fast. Pressing the button again, the M-axis stops. The speed is defined in section 3.3.Similarly, if you press the button, the M-axis moves down.You can press an arrow key and press the key to stop the M-axis.Switch4.Automatic OperationOverview(a) The automatic operation includes the following tasks:1. UNLOAD2. SETUP3. TEST cut4. AUTO(b) These tasks automatically stop if the following occurs:1. Low air pressure2. No grinding fluid3. No cooling water4. Low vacuum5. Spindle stopThe TEST cut and AUTO tasks in (a) at start-up, check spindle rotation, grinding fluid, vacuum, and Z-axis position. Note: If the Flexible Program has a grind fluid ON/OFF command, the grinding fluid check is ignored.You can cancel the start-up check from the program. If any of the changes in (b) occur, the automatic operation stops.4.1UNLOADPurposeThe UNLOAD operation moves the Z-axis to the machine origin. The machine origin has been set at a location 90mm from the table top surface.UNLOAD operation and methodPressing the switch starts the operation. The Z-axis starts moving up. When the system detects the upper-limit LS, the axis stops. The system then starts lowering the Z-axis for the distance (FIRST) set in the Z-axis constant screen. After lowering the Z-axis, the system decelerates the Z-axis and detects the Z-phase (Z-axis motor encoder). After detecting the Z-phase, the system lowers the Z-axis for the distance (FINISH) set in the Z-axis constant screen.4.2SETUPPurposeThe SETUP operation moves the Z-axis to the process origin. The process origin is computed from the grindstone diameter and jig height so that the grindstone periphery is located 2mm above the bar surface.SETUP operationPressing the switch lowers the Z-axis fast. When the Z-axis descends for the distance calculated by the following equation, the Z-axis stopsSETUP = 90 (Grindstone diameter/2 + Jig height 2)Unit: mm4.3TEST cutPurposeA TEST cut is done so that the system learns the grindstone position.TEST cut and the Flexible ProgramYou need to be careful when you program a TEST cut in the Flexible program. It involves all of X STEP2, X STEP3 and Z STEP.Set X STEP2 as the distance that the microscope moves before the grindstone. Set X STEP3 as the cut length.The Z-axis moves down for a distance equal to the sum of Z STEPs 18.You can use any other commands.TEST cut methodRun the TEST cut as follows: (1) Set the automatic program; (2) Perform the UNLOAD and SETUP; and (3) Press the key and then the key.InterlockYou can cancel the interlock by the same way described in the AUTO operation in section 4.4.4.4AUTOAUTO operation: PreparationBefore you perform an AUTO operation, you need to do the following operations: UNLOAD, SETUP and TEST cut (for the system learns the grindstone position).AUTO operationPressing the key starts the AUTO operation.InterlockWhen the interlock has been cancelled, the following is not checked when the system starts automatically: Z-axis origin, SP rotation, grinding fluid, vacuum. If any of the following states occur, the automatic operation stops: low coolant, low vacuum, spindle sensor error.If any of the above states occur, the red warning lamp turns on and the Z-axis moves to the UNLOAD position.5.Flexible ProgramYou need to program the automatic operation sequence. This section describes how to program the sequence.5.1ProgrammingPress the key.Press the key.The screen changes to the one shown in Figure 5-16.The box in the screen shows the resources available for the operation.This frame displays only 5 lines. You can scroll the display by pressingor.Select a number. The data entry screen appears. Enter the data accordingly in the screen. The resources specified will be displayed on the screen.Enter “END” after you enter all data to complete programming the Flexible program.You can set up to 254 steps in the Flexible program.The resources are described in detail in the Resource section.The letter (displayed in black/white reverse video) that appears in the square in the top left corner of the resource box indicates the current mode, thus: A=Addition modeB=Insertion modeC=Deletion mode Fig. 5-16: Flexible mode screenSwitch5.2Altering flexible mode programs The addition, insertion and deletion modes, explained below, can be used to alter the contents of already written programs or programs that are being written. Addition mode The addition mode is the mode that the system is in initially when the machine is switched to the flexible mode. To return to the addition mode after switching to the other modes, press and hold down thekey and press thekey.When the system is in the addition mode,is displayed in the top left corner of the resource box. The resource tables that th