QCC短路圈会成果报告11929

按一下以編輯母片標題樣式,按一下以編輯母片,第二層,第三層,第四層,第五層,*,QCC短路圈會,圈會成員：,圈長：賴國城,輔導員：黃貴煥,圈員：陳俊廷、龔靖城,陳溢群、陳建銘,方麒銘,1,工作進度,六月:收集不良樣本，層別不良原因。,七月:對策實施、數據確認、對策修正。,八月:全品目水平展開。,九月:對策數據確認與修正。,2,對策品目選定,依據每月計劃投入LOT數及LOT不良,率，我們選定兩個對策品目:,FD0475,FS0512,3,不良現況,依據取樣1142 PCS觀察分析，層別出目前FD0475與FS0512主要有下列不良現況:,1.銅面上有異物沾附(膜屑)，導致銅材未被氯化銅攻擊,2.蝕刻不淨,3.其他因素,4,銅面上異物沾附(膜屑):70.3%,5,蝕刻不淨:19.1%(FS0512),6,其他因素:10.6%,7,膜屑反沾,8,問題層別,我們將顯像後的製品烘乾，用顯微鏡觀察發現，有大量膜屑沾附。,9,觀察顯像後水洗槽的濾網，發現大量膜屑被帶出。,10,我們取樣5月份週保前後各5 LOTs做比對,資料來源:ERP,週保前,日期,品目,製番,銅殘,短路,LOT不良率,5月9日,FS0553,9505-00565,0,7,3.50%,9505-00566,1,3,2.00%,9505-00567,0,3,1.50%,9505-00568,0,3,1.50%,9505-00569,3,4,3.50%,5月14日,FS0593,9505-02722,0,7,0.29%,9505-02723,0,3,0.13%,9505-02724,0,10,0.42%,9505-02725,8,3,0.46%,9505-02726,0,4,0.17%,5月21日,FS0553,9505-07155,0,3,1.50%,9505-07156,1,3,2.00%,9505-07157,2,2,2.00%,9505-07158,0,2,1.00%,9505-07159,1,2,1.50%,平均LOT不良率:,1.43%,11,單位:Pcs,週保後,日期,品目,製番,銅殘,短路,LOT不良率,5月9日,FS0282,9505-01335,0,3,0.03%,9505-01336,0,6,0.06%,9505-01337,0,0,0.00%,9505-01338,1,2,0.03%,9505-01339,0,3,0.03%,5月14日,FS0696,9505-04280,0,2,0.10%,9505-04281,0,0,0.00%,9505-04282,0,2,0.10%,9505-05265,0,4,0.20%,9505-05266,0,2,0.10%,5月21日,FS0633,9504-15837,0,0,0.00%,9504-15838,0,0,0.00%,9504-15839,0,0,0.00%,9504-15840,0,1,0.01%,9504-15841,0,0,0.00%,平均LOT不良率:,0.04%,12,故我們假設造成,短路LOT不良率差異,的原因為:,1.濾袋更換，提高過濾效果。,2.藥水更新，提高顯像能力。,3.滾輪清潔、降低反沾機率。,13,要因分析:膜屑反沾,人,濾網清洗未落實，濾袋更換未落實。,機,過濾效果不佳，滾輪排列設計不佳。,料,濾袋、濾網網目過大，,法,藥水老化，自動定量效果不佳。,14,對策:,1.變更滾輪排列，減少實心滾輪使用,2.增加顯像藥液、濾心濾袋更換頻度,3.建浴室建浴程序標準化,4.調整自動添加系統，維持藥水穩定,15,變更滾輪排列,變更前,變更後,將原有放置於顯像槽與水洗槽間之實心滾輪，變更為輪片式滾輪，減少滾輪與製品接觸面積，降低異物反沾之機率。將水質,PH值,控制於,7.5,以上，防止弱酸水質與帶出的顯影液再反應。,16,資料來源:ERP,單位:Pcs,對策前,對策後,製番批號,短路,銅殘,LOT不良率,製番批號,短路,銅殘,LOT不良率,9505-09947,14,0,0.88%,9506-00795,10,0.63%,9505-09948,33,0,2.06%,9506-00803,13,0.81%,9505-09949,9,9,1.13%,9506-00798,8,0.50%,9505-09950,10,3,0.81%,9506-00804,11,0.69%,9505-09954,26,0,1.63%,9506-00796,9,0.56%,9505-09953,23,1,1.50%,9506-00801,14,0.88%,9505-09958,10,0,0.63%,9506-03239,10,0.63%,9505-09961,4,0,0.25%,9506-03240,11,0.69%,9505-09962,15,0,0.94%,9506-03241,13,0.81%,9505-09963,20,8,1.75%,9506-03246,7,0.44%,9505-09965,17,0,1.06%,9506-03251,13,0.81%,9505-09967,12,11,1.44%,9506-03253,7,0.44%,LOT不良率平均:,1.17%,LOT不良率平均:,0.66%,總投入:19200 pcs,總投入:19200 pcs,我們測試了12 LOTS，並與測試前做比對。,17,變更濾網網目,我們將顯像後水洗槽原本使用25網目的濾罐更換為48網目，藉以提高過濾效果,。,18,濾網變更後，仍有大量膜屑帶出,分析藥水老化與溶膜量,19,顯像藥液:,DOWN槽後，追蹤其葯液變化發現，自動添加系統無法維持穩定的作業濃度。,取樣時間,2006/8/11 13:00,2006/8/11 18:30,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,10.42,0.96%,10.81,0.84%,雙面顯影槽,10.53,0.89%,10.85,0.87%,取樣時間,2006/8/12 07:30,2006/8/12 13:10,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,10.88,0.87%,10.85,0.87%,雙面顯影槽,10.68,0.83%,週保養,取樣時間,2006/8/15 08:20,2006/8/15 12:30,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,10.99,0.96%,11,0.97%,雙面顯影槽,10.97,0.99%,10.98,0.92%,取樣時間,2006/8/16 08:50,2006/8/16 15:20,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,11.04,0.98%,11.12,0.91%,雙面顯影槽,11.03,1.00%,11.09,0.89%,20,根據DRY FILM供應商華立的建議:,25um厚度的DRY FLIM藥水實際溶膜量(S)要 0.4m,2,/L,20um厚度的DRY FLIM藥水實際溶膜量(S)要 0.5m,2,/L,依廠內生產品目去做估算:,0.25m*0.3m*30%(被溶蝕率)*100(張數)=2.25 m,2,/lot,1000(槽體積)*0.5=500m,2,1000(槽體積)*0.4=400m,2,500/2.25=222 lots,20um厚DRY FILM(單面板),400/2.25=177 lots,25um厚DRY FILM(雙面板),再導入每班產出量:,單面板:70 lots/班,222/70=,3.17 班(約1.5天),雙面板:40 lots/班,177/40=,4.43 班(約2.5天),21,我們依據華立提供的滴定方法，量測單面板機台顯影槽DOWN槽前、後實際溶膜量。,DOWN槽前一日(12:00)取樣滴定,S=,0.37789,DOWN槽後(09:00)取樣滴定,S=0.13966,DOWN槽後一日(10:00)取樣滴定,S=,0.31217,DOWN槽後一日(16:00)取樣滴定,S=,0.39432,單面蝕刻機(S 0.5),22,增加DOWN槽頻度、濾袋更換頻度。,1.先開立暫定條件，增加DOWN槽頻度，提高藥水溶膜能力。,2.增加濾袋更換頻度，增加顯像槽過濾能力。,23,設定補充秒數,設定間隔秒數,實際補充秒數,實際間隔秒數,CYCLE TIME,實際補充量,預估每日補充量,中繼次數,10,30,10,60,70,625ml,771.43 L,1234,20,30,20,60,80,1250ml,1350 L,1080,30,30,30,60,90,1980ml,1900.8 L,960,10,10,10,40,50,625ml,1080 L,1728,10,20,10,50,60,625ml,900 L,1440,10,30,10,60,70,625ml,771.43 L,1234,單面蝕刻機顯象中繼槽作動測試,24,設定補充秒數,設定間隔秒數,實際補充秒數,實際間隔秒數,CYCLE TIME,實際補充量,預估每日補充量,中繼次數,10,30,10,60,70,475ml,586.29 L,1234,20,30,20,60,80,980ml,1058.40 L,1080,30,30,30,60,90,1450ml,1566 L,960,10,10,10,40,50,475ml,820.8 L,1728,10,20,10,50,60,475ml,640 L,1440,10,30,10,60,70,475ml,586.29 L,1234,雙面蝕刻機顯象中繼槽作動測試,25,建浴室:在自動添加的測試中發現,建浴室顯像藥水的調配程序,未被標準化,，影響測試的準確性。,26,在調整自動添加量的過程，我們導入了PH值作為顯像藥水老化與否的判定依據。,條件一、自動添加設定10秒，間隔10秒,單面機台:每次補充量 625ml，平均PH值為10.57,雙面機台:每次補充量 475ml，平均PH值為,10.49,條件二、自動添加設定30秒，間隔30秒,單面機台:每次補充量 1980ml，平均PH值為11.12,雙面機台:每次補充量 1450ml，平均PH值為11.09,藥水商給的建議是在PH11以上，而參考旗勝的管制點是設在PH10.5以上,27,FD0475 LOT不良率,資料來源:ERP,月份,4月,5月,6月,7月,8月,銅殘,1.4382,0.4112,0.2698,0.1011,0,短路,0.3644,1.2118,0.7996,0.1729,0,銅殘+短路(Q版),0,0,0.0996,0.539,0.6294,LOT不良率(合計),1.8026,1.623,1.169,0.813,0.6294,改善效益:,28,FS0512 LOT不良率,資料來源:ERP,月份,4月,5月,6月,7月,8月,銅殘,0.04046,0.2079,0.0536,1.6964,0.0047,短路,4.6891,9.1469,3.9532,4.5988,0.4638,銅殘+短路(Q版),0,0,0.5064,0,2.2325,LOT不良率(合計),4.72956,9.3548,4.5132,6.2952,2.701,29,八月導入全品目後:,TARGET:0.37,資料來源:ERP,擷取自10月24日止,月份,4月,5月,6月,7月,8月,9月,10月,銅殘,0.15,0.21,0.1,0.07,0.01,0,0,短路,0.49,0.67,0.42,0.18,0,0,0,銅殘+短路(新制),0,0,0.07,0.39,0.75,0.72,0.59,LOT不良率(合計),0.64,0.88,0.59,0.64,0.76,0.72,0.59,30,蝕刻不淨,31,要因分析:蝕刻不淨,人,蝕刻速度過快,未在作業前做測速動作,品目切換未接PET作間隔，直接調整速度,機,平行度,平行度未校正，導致製品均勻性不佳,擺動機構異常，噴嘴藥液噴灑無法涵蓋製品,噴嘴、噴管阻塞或破裂,料,來料異