MEMS数字麦克风基本知识课件

MEMS(,数字,),麦克风基本知识,MEMS Microphone,产品简介,MEMS,麦克风是由,MEMS,微电容传感器、微集成转换电路,(,放大器,),、声腔及,RF,抗噪电路组成。,MEMS,微电容极头部分包含接收声音的硅振膜和硅背极,硅振膜可直接将接收到的音频信号经,MEMS,微电容传感器传输给微集成电路,微集成电路可将高阻的音频电信号转换并放大成低阻的音频电信号,同时经,RF,抗噪电路滤波,输出与手机前置电路相匹配的电信号,.,完成“声,-,电”转换,.,MEMS,Microphone,工作原理,MEMS Microphone,产品简介,V,out,Silicon,Back Plate,Silicon,diaphragm,GND,RF Filter,MEMS,Microphone Module Structure,V,supply,MEMS Acoustic Sensor,ASIC,MEMS Microphone,产品简介,MEMS,Wafer,MEMS Die,MEMS,Microphone,Wafer & MEMS Die,MEMS Microphone,产品简介,MEMS,Microphone,Profile,Acoustic port hole,L,W,H,4,2,1,3,PIN# FUNCTION,1.OUTPUT,2.NO CONNECTION,3.GROUND, 4.POWER,MEMS Microphone,产品简介,序号,名称,1,Cover,2,Housing,3,Wire bonding,4,PC Board,5,Capacitor 10pF,6,Capacitor 33pF,7,ASIC,8,MEMS Die,MEMS,Microphone,Structure,1,2,3,6,7,8,5,4,MEMS Microphone,产品简介,Specification,MEMS Microphone,Frequency range,100-10,000Hz,Sensitivity (0dB=1V/Pa 1k Hz),-42dB+/-3dB,Output impedance,58dB,RF-filtering capacitance,10pF, 33pF, both or none,Change in sensitivity(,电压特性,),1dB across voltage range,Standard operating temperature,-40 to + 100,Current consumption,0.25mA,Supply voltage ratings,1.5V to 3.6V,Performance Comparison,MEMS Microphone,产品简介,Recommended Interface Circuit,AAC MEMS Microphone,Term3.,Term2.,Term4,Term1,-,+,Vref,External Gain=-R1/R2,(Set by customer),+,R2,R1,MEMS Microphone,产品简介,Solder Reflow Profile,Maximum solder profile: Do not exceed profile listed in this table,Stage,Temperature Profile,Time (Maximum),Pro-head,170180,120sec.,Solder Melt,Above 230,100sec.,Peak,260,Maximum,30sec.,Incoming Inspection,Wafer Sawing,Wafer Expand,SMT/glueing,Packaging/Cutting,Testing / Marking / Taping,Shipping Inspection,Packing,Wafer Fabrication,Packaging,Wafer Foundry,Pick up and place MEMS,Wire Bonding,Reliability Test,Wafer Testing,Wafer,Inspection,Production Process,MEMS Microphone,MEMS Microphone,产品简介,Cellular Phone(CDMA, GSM, PCS), Camcorder Phone,MP3 Phone, PDA Phone etc.,Camcorder, Digital Camera etc.,Ear Phone MIC for Headsets,MP3, Bluetooth, etc.,Notebook Computer,Desk-Top Computer,Video Door Phone etc.,Cordless Phone,MEMS,Wafer Fab,.,MEMS Packaging,Application of Product,MEMS Microphone,产品简介,MEMS Mic,MEMS Mic,Application of Product,