二次配系统简介

半导体知识厂务讲座（HOOKUP简介）SecondaryprocesssystemintroductionWorkingcharacteristicsWaferfactoryFabfeaturesandcapabilitiesofthegasrequiredChemicalsubstancesandtheirpropertiesrequiredforfabWorkcontentsWaferfactoryFABisamodernplantproducingchips,themainworkplaceforthecleanroom.Cleanroomisaconstanttemperatureandhumidity,temperatureis21c.Relativehumidity65%Fabcleanroomsdividedintothediffusionzone(furnacebatch),yellow,etching,thinfilmareas.FabfeaturesandfunctionalityofthegasrequiredDuetothemanufacturingprocessontheneedanduseofmanykindsofgasesinsemiconductorfactories.Wegenerallyarebasedongaspropertiestodistinguishwords.Specialtygasesandgascanbedividedintotwobroadcategories.Theformertouselessgas.SuchasSiH4andNF3.Whichuselargeamountsofgas.SuchasN2,andCDA.Duetoalargeramount;Generalgasofteninbulkgascall.TheBulkGasSpecialtygas-SpecialtyGas2-1BulkGasnthesemiconductormanufacturingprocess,needtoprovideavarietyofhighpuritygasusedinpneumaticequipmentpower,chemicalsorpressuremediumisusedasaninertenvironment,ortakepartinthereactionortoremoveimpurities,suchasdifferentfunctions.Becauseofincreasinglysophisticatedsemiconductorproduction,itsrequestsforgaspurityisevermentioned.Semiconductorfactorywillbebrieflydescribedbelowthegeneralqualityrequirementsandthenecessaryequipmentforgasanditsfunctions.2-1-1Bulkgasproducts:BulkgasSemiconductorplantscanuse,therearegenerallyCDA、GN2、PN2、PAr、PO2、PH2、PHe7Species.2-1-2Bulkgasmanufacturing:CDA/ICA(CleanDryAiClean,dryair.CDASourcestakenfromtheaircompressedbycompressordehumidifier,thenbyafilteroractivatedcarbonadsorptiontoremovedustandhydrocarbonstosupplythecleanroomCDA/ZCD。CDASystemAircompressorBufferstoragetankcoolingdryerFilterCDAGN2Compressedusingcompressorcoolinggasintoliquidgas.Catalyticconverter,COreactiontoCO2H2,reactiontoH2O,thensieveabsorptionofCO2,andH2OAndthenslipseparationO2&CnHmN2=-195.6CO2=-183CPN2GN2ThroughthePurifier(Purifier)Purification,producinghighpurityN2。Liquidoriginalnitrogenpurity99.9999%Afterpurificationforpurificationofnitrogenpurity99.9999999%GN2&PN2SystemSeeattachedmap)PO2Compressorcompressedcooledgasintoliquidgas,awardedbysecondslip99%AboveinpurityO2AndthendropN2、Ar、CnHm。AnotherbyelectrolyticdissociationH2&O2PO2Systen(Seephotos)PArCompressorcompressedcooledgasintoliquidgas,awardedbysecondslip99.0%Morepurityargon.Arcontentintheairisonly0.93%.Productioncostsarerelativelyhigh.PArSystemSeeattachedmap)PH2Compressorcompressedcooledgasintoliquidgas,awardedbysecondslip99.0%AboveinpurityH2。AlsobyH2OelectrolyticdissociationH2&O2.Highhazardmanufacturingcheapbuteasytotriggerexplosions.PH2SystemSeeattachedmap)PHeRareandrichHeExtractedfromnaturalgas,itsmainoriginfortheUnitedStates,andRussia.Aircompressorscompressedcooledgasinliquid,easilyobtainedfromtheslip.Helium=-268.9CMethane(Methane)=-161.4C0PHeSystemSeeattachedmap)2-1-3UseofbulkgasesinsemiconductorplantsCDAMainsupplyFABPneumaticdevicepoweredairsourceandblowing(Purge),LocalScurruberFuelit.ICAMainfacilitysystempneumaticequipment-poweredgassourceandblowing.N2Mainsupplypartofthepneumaticequipmentairsupplyorsupplyblowinganddilutesourceofpressureofinertgasandchemicaldelivery.O2SupplyETCH-ProcessoxidizerneededandCPCVDSuppliesoxidationprocesswithbusinessroutinesupplyO3GeneratorRequiredO2Suppliesandotherprocessesrequired.ArSupplySputterManufacturingprocessandionsputteringheattransfermediaChamberDilutionandinertgasenvironment.H2Feedingtubedevicesburningmixofoxygen,POLYManufacturingprocessH2BAKEPurposes.W-PLUGmanufacturingprocessasWF6forthereductionofgasandotherprocesses.HePressuremediumsupplychemicalsandprocessingchipscool.BulkGasAlthoughnotasSpecialtyGas,Somewithhighlytoxicandcorrosive.Butwestillneedtopayattentiontosafetyusingabulkgas.GN2,andPN2andPAr,andPHehasthedangerofsuffocating,thatgasiscolorlessandodorless,massiveemissionofleadintheaircontainO2(Usually21%),decreasedto16%below,namely,headachesandnausea.DangO2lessto10%Shi,whowillbeinaStateofthewillisnotclear,6%,instantlyFaints,unabletobreathe,6minuteslessthandeath.PH2duetoleakageorwhenmixing,concentrationofhisownaslongastheH2oftheblastRADIUS(4%-75%)(air),iftheygotthefireburningthisgasismixed.PO2willmakematerialeasilyoxidizedtoyieldburning,causingfiremishap.Therefore,ourworksinthesemiconductor,inthedesign,construction,andhowtoavoidleaks,andhowtoprotectthemselvesfrom,youareoneofourhardwork.2-2SpecialtyGasUsedbythesemiconductorfactorySpecialtyGasAwiderangeofabout40or50,accordingtoriskscanbedividedintothefollowingcategories:2-2-1FlammablegasesWhensomeleaksgaswhenmixedwith,aslongashisownconcentrationinacertainrange(air),iftheygotthefire,thisgasisburningfromthemix.Thiscalledtheexplosionofthegasrange.Suchas:SiH41.35%-100%SiH2CL24.1%-98.8%PH31.32%-100%2-2-2LowpressuregasSomegasesundernormalfortheviscousliquidgasatroomtemperatureofsaturatedvaporpressureislessthan10Psi,Canalsointerferewithpipelineblocked,needtopackheat,improvingtheairvaporpressurecanbeanadequatesupplyofgas.Forexample:DCSandCLF3andWF62-2-3ToxicgasSomegasesduetoitsstrongreactionofanimals(includinghumans)respiratoryandmucousmembranes,skinandotherfeatureswithastrongimpact.Suchas:NF3,PH32-2-4CorrosivegasesSomegasandwatereffects,thatisproducedbyhydrolysisHCLHFAcidicsubstancessuchas,thehumanbody(includingeyes,nose,skin,respiratorysystem,etc)andequipment(suchaspipingandvalves)haveacorrosiveeffect.Thisgashasthefollowing:HCLCL2、SiH2CL2、BCL3ClElementsofgas-HCLBF3SiF4、WF6FElement-HFNH3-AmmoniawaterVeryirritating2-2-5AsphyxiantgasesSuchas:CO2、CF4、C2F6Suchgases,odorlessandtasteless.IfalargenumberofemissionofaircausedbyO2contentreducedto16%whentheheadacheandnausea.DangO2lessto10%Shi,whowillbeinaStateofthewillisnotclear,6%,instantlyFaints,unabletobreathe,6minuteslessthandeath.2-2-6SpontaneouscombustiongasesSomeofthegases,mixedwiththeair,evenwithoutthefirecatchesfirespontaneouslyburstintoflames.Thisiscalledspontaneouscombustiongases.Itsfireatroomtemperature.Thisgasare:SiH4PH3、B2H6Thoughwecannotexcludethesegasescancausevariousadverseeffectsonus.Butweworkinginsemiconductorplants,maybeincludedinthedesign,construction,andstoploss.Toavoidleaks,hestressed.Fabsrequirechemicalsubstancesandtheirproperties3-1Typesofchemicals(solvents)C26DEKC-270、NMP、OK-73、A515、IPAInadditiontoEKC-270PFA04BATube,othersuse316LEPTube.TakeoverthewaywithVMBoutletandthemachineinletsidetakesover.3-2Chemicalspecies(pHclass)HF1%HF49%、H2O2、NH4OH29%、DEVELOPERM1、BOE200:1、BOE500:1BOE50:1、HNO3、HCL、H3PO4、H2SO4。UsedPEA/CLEARPVCdoublepipebenddirectly,takeoverthewaywithVMBoutletandthemachineinletside,innertubedirectexpansiontubes.Outertubeusingthe40AC-PVCSOKEXed.3-3ChemicalcharacteristicsSeetablebelowSerialnumber-ChemicalnamechemicalcharacteristicsH2SO4SulfuricacidHighlycorrosiveliquidsH3PO4PhosphoricacidCorrosiveliquidsHNO3NitricacidHighlycorrosiveliquidsHCLHydrochloricacidLiquidcorrosiveirritantBOE50:1EtchingsolutionThecorrosiveandtoxicliquidsBOE100:1EtchingsolutionThecorrosiveandtoxicliquidsBOE200:1EtchingsolutionThecorrosiveandtoxicliquidsDEVDeveloperCorrosiveliquidsNH4OHAmmoniawaterStrongirritantliquidH2O2HydrogenperoxidesolutionIrritant,corrosiveliquidsHighlycorrosiveliquidsCorrosiveliquidCorrosiveliquidM1Nitricacidhydrofluoricacidmixture49%HFHydrofluoricacidinaqueoussolution1%HFHydrofluoricacidinaqueoussolutionThinnerCrystalcleaningliquidFlammableliquidsEKC270_iquidphotoresistremovalCorrosiveandirritantliquidA515DeveloperFlammable,irritantliquidNMPKaketone,methylFlammable,irritantliquidIPAIsopropylalcoholFlammable,toxicliquidsC260FountainsolutionFlammable,irritantliquidWorkcontentsTheworkwedoistheuseofautomatedtoolssuchaswelding,pipeBender.Airbottlecabinet(ortank)sidesetupthepipelinetoFABreservednearthemachineandopenthevalveintheTAKEOFpoint(thisisreferredtoasadistribution).ThenTAKEOFpointpreparationpipelinetocontactsecondarywith(HOOKUP.IntroductiontosemiconductormaterialsofpipingandvalvesPipefittings-Pipe&TubeConnectingaccessories-FittingsValves-UltraCleanValvesPressureregulatingvalve-PressureRegulatorPressuresensors-PressureGauge&TransducerFilter-GasFilterSelectionofmaterialsbasedonTwo-discsetoftheform1.AboutPipe&Tube1.Accordingtomaterialpipecanbedividedinto:SUS304SUS316SUS316LThedifferenceisthatSUS316Addmo(Mo)Metals,improvetheirmechanicalproperties.LSaidmaterialtoreduceCIncreasednickel(Ni).1- 2.Accordingtospecificationsclassificationcanbedividedinto:Sundials(JIS):PIPESIZEAmericanStandard(ASTM):TUBESIZEItshouldbenotedthat:1PIPESIZE=25A)utsidediameterOD34.4mm,TUBESIZEOD25.4mmPIPESIZE25Alsoknownas1”,50AAlsoknownas2”,80AAlsoknownas3”,100AAlsoknownas4TUBESIZJBenerallyusedin1GasPiping),Commosizes1/8(A),勿8(B),3/8(Threepoints),48(D),58(Fivepoints),6/8(Sixpoints),1。1- 3.Accordingtotheclassificationofsurfacetreatmentmethods:IsgenerallydividedintothreeAP(Annealedandpickled)Level(plaintubes):picklingtubeBA(Bright-annealedGrade:brightannealedtubeEP(ElectrolyticpolishedLevel:electrolyticpolishingpipesNote:thefactorsaffectthepriceofpipeisthemostimportantdeterminingfactorsinsurfacetreatmentmethods,theheightofthepriceorderEPBAAP。1- 4.Accordingtothedifferentiatedthickness:GeneralthicknessspecificationsSCH5S、SCH10S、SCH20S、SCH40S。1-5.Pipemanufacturingprocesscanbedividedinto:SINGLEMELTDOUBLEMELAimedatreducingtubeimpuritiesandincreasedcorrosivity)example:1- VIM+VARSUMKINPatentednicknames)VIMVACUUMINDUCTIONMELTINGVAFHVACUUMARCREMELTING6.Weldedandseamlesspipescanbedividedintotwotypes.2- AboutFittings1.Materialandpipefittings.(EP/BA.)2.Commonlyusedcategories:2- Nut+Gland+GasketElbowTee、ReducerCapPlugConnectorConnector3.Typesandspecifications:2- CangenerallybedividedintoVCR(/8),/SWG(1?)/Welding/Screwthestreets/FlangeSizefrom1/8-T(VCR/SWG)/4300A(Welding/Flange)ShortconnectorSCM(micro)orLongconnectorSCL(long)&SCF4.Label:KITZ/HAM-LET/IHARA/SWAGELOK/FUJIKINN2O、CO、O3-GasketmustbeSUSNote:thegasusedGasketNiMaterial.CONihaseroded,sotheCOGasketmustbeaSUSseriesmaterial.3- AboutValves1.Materialwithtubing2.Commonlyusedcategories:Manualvalve(ManualValve):Ballvalve(BallVavle14-3/4)Corrugatedpipevalve(BellowsValve/4-largesize,usedforhighpressure)Diaphragmvalve(DiaphragmValve/4-1forlowvoltagehigh)Pneumaticvalves(AirValve):Usetheaircontrolvalveopenorclosedsource,achievethepurposeofautomation,pneumaticvalveitselfhasalongdrive(NormallyOpen/ZN.O.)Longclosed(NormallyClose/n.c.)WithtwomorecommonlyusedforN.C.a. Pneumaticvalveactuationformsaredividedinto:Diaphragmtypepneumaticvalve(AirOperatedDiaphragmValvGenerally300psiCheckvalve(CheckValve)Alsoknownasone-wayvalves,checkvalves,mainfunctionsforthemaintenanceofthepipelinegas(liquid)unidirectionalflows,preventingthedamagecausedbyupstream.Pressurereliefvalve(ReliefValve):Alsoknownasthesafetyvalve,itsfunctionistomaintainsystempressure,whenthepressureexceedssafetywhensettingpressure,willbeviathepressurereliefvalve.Voltageregulationmethod(Regulator):Alsoknownasthereducingvalve,mainfunctionistochangethegasfromhighpressureinletport(HP),Adjustingtheworkingpressure,thentheoutletport(LP)Flowtothepipeordevice.Voltageregulationmethodforgasshouldbeused,pipingandequipment7半导体知识厂务讲座（HOOKUP简介）requirements,andcandistinguishbetweentwobroadcategories:3- ForgeneralindustrialuseInstrument(bannedoiltreatmentOilFree),Applicablegaspurity,non-corrosive,non-toxic,non-flammable(suchasN2,He,CDA,Ar.)SemiconductorHighPurity(BA/EPApplytogaseswithhighpurityandcorrosive,poisonous,flammable(suchasH2,HCL,H22)3.Label:4- KITI/OHNO/IHARA/MOTOYAMA/NUPRONH3CheckValvemustbeAFLAStype4.NotesHighpressurevalve/LowpressurevalveAccordingtodifferentplacestochooseTwowayvalve/Thethree-wayvalve/Four-wayvalve/.Accordingtoyourdemandtoselect,payattentiontotheflowofchoiceAboutRegulator1.Materialandpipefittings2.Framematerial:PCTFE、SS316L、Kel-F813.Commonlyusedcategories:3- Highvoltage/Low-voltage/Generalpressure2PNoheader/3Por4PSingleordoubleheadersforthetableheaderVCR/SWG/Flange4.Note:4- BulkGaGeneraluse316LBA316LEP/VCRSWG1/4R25Series38R35Series1/2RH1SeriesBecauseofdifferentflowSpecialtyGasa:Toxicity/Flammability/Noblegases:316LElL25orR25Seriesb:Corrosivegases:VIM+VAL25SVASeriesc:Lowpressuregas:adjustablenegative-pressuretypesshouldbeselected(type)-L96SSASeriesAboutPressureGauge&Transducer1.Popularcategories:5- PressureGauge(P(P)ressuregaugeheadpointertype,C122PressureSwitch(PS)ressureswitches,analog,withtransmissionlines,IPS122DigitalPressureGauge(PID)lectronicpressuregaugePressureTranaducer(PPfessuretransmitters2.Pressurerangecanbedividedinto:4- Highvoltage(03000Psi)Low-voltage(-30Hg030Psi)(-30Hg0160Psi)3.Powersupply:24VDC420MaDCAboutGasFilter1.Features:filteringparticlesintheair(particle)2.Filtergradeoption,thatis,filterdiameter(particlesize),Canbedividedinto:0.01um/0.03um/0.003um(Micron)3.Centerfilter(Medium)Material:PTFE/SS316L/Nit(efulong/stainlesssteel/nickel)6-4.Flow(FlowRate)Generalflowandhighflow30slpm/100slpm/300slpm/1500slpm6-5.Connectingtype:VCRorSWGorWelding6-6.Commonfiltermaterial:5- BulkGabPTFESpecialtyGasToxicity/Flammability/InertgasPTFESeriesCorrosivegasesPTFEForCCHPTFEtypeFiltereffectsLeak-captureratesofanti-corrosionperformancePTFE(FGoodBad10.8N/ASS316L(M)VerygoodWell6.2badNickel(Ni)VerygoodVerygood10.8goodSelectionofmaterialsbasedon1.Typesofgases,gasproperties:2. Effectsofmaterialgrade:AP/BA/EP/V+V(VIM+VAR)2.OwnersneedsandbudgetsNotethereisnospecifiedbrandorspecifications3.AccordingtothedosagerequiredformachineanditsowncontactsselectedmaterialsizeDimensionsthataffectthematerialsused:1/4、38、1/2、15A7-4.MachinerequiredmaterialpressureandflowdifferentoptionsformSelectionofpressurerangesflowfromsuitableforvalves.(1/434”)7-5.DependingonthediscAssemblychoosecomponentjointtypeVCAForM;SWG;Welding7-6.Operatingtemperature,CostTwo-discsetoftheform:Ingeneralhavethefollowingcommonforms:SpecialtyGasNodiskgroup,VMB/VMPReplace)BulkGasEPLevelbytheDiaphragmValve+Regulator+Gauge+FilteCompositionBALevelbytheBallValve+Regulator+GaugCompositionNote:closethesecondarydiskgroupwhenpipingPartsStructureswillnotbefinalizedafterdiscussionswiththeowner.ConstructionspecificationsPipingerectionBendstubingspecificationsPipecuttingandmillingsurfacesInstallationofpipejointsSpecificationforweldingCHEMICALHOOK-URbecificationsPipingerection1PrefabricationworkenvironmentTobeequippedwithatemporarycleanStudio(CleanBooth)Andallpipingworkoperationwithinthisareabasicallycompleted,inordertoavoidunduepollution.ThiscleanStudioandcontrolmustbemaintainedinthefollowingenvironmentalconditions:TemporarycleanStudio:a. Numberofdust(static,particlessmallerthan0.3um)1um=0.001mm:(Humanhair100um)Warehouse:(Discusedforstoringmaterialsandprefabricated,fittings,etc)ThecleanlinessisClass10000。Class10000CleanBoothneasuredtheamountofparticles(0.1umparticlesabove)cannotexceed10000PCS/c.fCuttingworkareas:Class1000Forcuttingtubes,assembleddisc,andsoon.Weldingworkarea:Class100Forweld,prefabricatedpipefittings.b. Maintaincleanconditions:Weldingworkarea,thetemperature21CRelativehumidity65%。c. Airflow:d. Cyclesperhour5-10Theenvironment:ThisStudiotomaintainpositivepressureenvironment30Pa,Enoughtoblockparticles,greaseandotherforeignmatter.e. Workinthisareamustbedressedincleanclothes,shoesandPVCGloves.Whenthenumberofparticlesoverweight,shouldreducethenumberofcleanroomorreplaceMEPAFiltersdotestagain,untilitreachesthestandardbeforestartingwork.2Prefabricated(inasimplecleanroomcleanbooth)1-2-1.RongRongsolutionautomatically,ifthepipediameterisgreaterthan20AAccordingtoRongisrequired.Rongoccasions,priortoconstructiontodeterminepersonsneedtobeperformedbyaqualifiedBACKSHIELDompliancegasflowandpurityrequirements.Rongisconfirmingthattwosectionsofpipingtreatmentcompliance,anddistributioncenters.RongShi传intakeshouldbelessthanthethicknessofthepipeV3。Rongintervalaccordingtotubingsize,butordinarybyequallyspacedaroundtheimplementation.Fakefilm,identifiedRongRongtocleansurfacesafteracidificationwiththeflatsurfaceofpiping.WhenusingautomatedRongRong,underthesameconditions,beintherealRongsamplestodeterminewithoutanyproblems.Ronglocation4Pointor61-2-2.Chong-blowngas(BacksealgasUsingargongasdewpoint-80COrlower,theoxygencontentinthe0.1ppmHere,particles(0.1umMore)contentiszero.1-2-3.RushblowtubesforsleeveConnectingimpulsegaspipelinesanderectingthepipelineusing(Backsealjig)Asshowninfigure(a)showsFigure(a)1-2-4.Setupprocedure(figureII)Willworkonthebothendsofthepipesleevetubing,connectflushinggasandvalve1-2-5.EncapsulatedAftercompletingthewelding,tubefullArGas,andwrappedwithplasticdust-freepaperattheendoftwolayers.Ifthevalveisconnectedattheendofthe,wrappingpaperwithplasticvalve.1-2-6.StorageandhandlingMaterialsmustbeplacedinaspecialstorage,onsiteorinthematerialtoprovideatemporarysimplecleanroom,allmaterialshouldbeplacedinorder.In-storematerials,electronicpolishedfittingsmustbeseparatedandwithoutelectronicpolishedfittings.Whennotusingfittingplasticwrappersshouldnotbeopeneduntiluntilthesitecanbeopenedonlywhenyouwanttouse,andmaterialsshouldnotbeplaceddirectlyontheground.1-3Sitewelding1-3-1.Spotweldingpersonnelmustbetrainedinidentificationofhighpuritypipingtechniqueadopted.Resetthesceneintact.ThepipebeingweldedtuberemovedandconnectBacksealgas。RushblowscleanweldingpipeendBacksealgaRemoved,andstartwelding.1-3-2.PipelinemaintenanceconditionsEvenifweldends,alsowanttomaintainasmallN2ArTube,rushedtopreventairblowingintothetube.1-4Pipefixing1-4-1.Plumbingfixturesnotburdenwiththeconstructiononthepiping.1-4-2.Constructionplumbingisnotthecorrectangleincombinationisnotavailabletosupportcorrect.1-4-3.Pipingconnectingsection(Rong)cannotsetsupport.1-4-4.Constructionofpipesupportsmustbeinaccordancewiththedesignbasis.1-4-5.UShaped-beamfixingpipes,considerpipingthermalexpansionandcontractionandseismicoccurrenceofsuchabnormalities,donotbundletootight,fitpipingrouteconstruction.1-4-6.Vibrationofpipingmaybeaffectedbytheoccasion,tobejoinedwiththesupportstructuresandpipingvibrationcushioningmaterial.1-4-7.Fixedpiping,musttakeintoaccountthefutureneeds,toreservespace.1-4-8.Outdoorpipingandcorrosionprotectionofburiedpipingshallbeinthestrategy.(Especiallywhenburiedpipingshallbediscussedindetailwithexperts)1-4-9.Generalplumbingfixedsettingsinthefollowingfigure:1-4-10.Pipingshouldbeconsideredmaterialevenwhenfixed,corrosionpropertiesselectedarecompatible.1-4-11.Supportwhenundertheinfluenceofvibrationofpiping,shallbeinthepolicyresponse.(Referencedesign)1-4-12.Supportthemanufacturemustbetakenaccordingtotherulesofsemiconductors,avoidsuperficialinjuries.1- 4-13.Pipesupportmaterialsmustalsobanoil,wipewithalcoholbeforeAssembly.2- Bendstubingspecifications1Pipebendingoperationshouldpayattentiontotwoprinciples:1- 1-1.Surfaceatbothends,fromtheshortsidefirstandbegintobend.Markwillberelativelyshortlengthtubing,thissectionshouldbeplacedintheBenderTheleft,SetThesecondplace.BentLatchfixedPipe,slidethetubingtothetop,rotate90tocompletebends.Pipingthescarsfromabovehavethefollowing.LatchPartsofthescarsBendingSomescarsBetweenthetwoscars,Scarstopayspecialattentionto.Sectionattheendoftubing,SwageLokointringswillproduce100%Leakproblems.Latchscarswillnotoccurtosomecirclesthiskindofproblem.2-1-2.Endsofsidebend180(r-bend),mustbe180bendingoperations.Thistime,rmarkbendingdimensionsintheplumbing,andthisdealBenderlefttoSet.1. 2-2Pipebendoftheactual2-2-1.90bend*Marksize,SetBenderIstotheleft(forexample,whenyoustartbendingsome)LinkStoppimPressed,asareferencepoint.2. DashandmarkingpipeLinkMarksuperimposedon90AndthenusetheLatchFix.3.Shoehandle0F6reHandle0Agreetogether.4.ShoehandleRotatetoForehandle90Wire,bendthepipe.1. ScoreTocheckifthereisatrightangles.*Marksize,SetBenderRightsideDistributionmarkcrossedandLinkMarkRFit,likeanyotherorder.1. 2-2-2.180(r-bend)Linesizeofthedistributionmark,setintheBenderTheleft