洁净度等级

ISO14644-1 （国际标准）空气洁净度等级(N)大于或等于所标粒径的粒子最大浓度限值(个/每立方米空气粒子)类似于传统级别ISO Classi102ISO Class210024104ISO Class31,0002371023581级ISO Class410,0002,3701,0203528310级ISO Class5100,00023,70010,2003,52083229100级ISO Class61,000,000237,000102,00035,2008,3202931000 级ISO Class7352,00083,2002,93010000 级ISO Class83,520,000832,00029,300100000 级ISO Class935,200,0008,320,000293,000各国洁净度等级近似对照表个/MNISOUSUSEECFRANCEGERMANYJAPAN14644-1 (1999)209E(1992)209D(1988)cGMP(1989)AFNOR(1981)VDI 2083(1990)TAOA(1989)1_-2-02-M1-31-13100353-M21-2-1,000-M3-3,5305100A+B4,0003510,00035,300_M41,0001,000-4_100,000-M5-353,000710,000C400,000571,000,0003,530,000-M6100,000-4,000,0006-10,000,000-M7-