Laser-produced-plasma-for-EUV-lithography激光产生的等离子体EUV光刻课件

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*,Click to edit Master title style,Click to edit Master text styles,Second level,Third level,Fourth level,Fifth level,Click to edit Master title style,Click to edit Master text styles,Second level,Third level,Fourth level,Fifth level,*,单击此处编辑母版标题样式,单击此处编辑母版文本样式,第二级,第三级,第四级,第五级,*,*,The Application of Technology Readiness Levels in Planning the Fusion Energy Sciences Program,M.S.Tillack,ARIES Project Meeting,45 September2019,The Application of Technology,1,Topics,Status and plans,Oral and printed publication of our results,TOFE Presentation,Dry run,solicit recommendations for improvement,Possible adjustments for broader(FESAC)consumption(later),Discussion of TRL evaluation results,pathway analysis,Current readiness,value of ITER,role of CTF,Discussion,Revisions,action items to complete this exercise,TopicsStatus and plans,2,Review of progress,Jun 07,Aug 08,Dec 07,Mar 08,TWGs created,tasked to define R&D status&needs,plans&options,Advisory committee meeting,Agreed to adopt TRLs,Defined issues and assigned individuals to create/describe TRLs,Methodology defined,based on utility requirements,Draft TRL tables produced,report outline created,Reference concepts defined,first evaluation performed,Report details filled in,Scenarios examined,Publications 95%complete,May 08,Idea of using TRLs floated,Sep 07,Review of progressJun 07Aug 08,3,Plans to present TRL methodology to the broader community,(,see aries.ucsd.edu/ARIES/WDOCS/ARIES07/TWG/,),Printed matter,TWG“Interim Report”UCSD-CER-08-01(posted on web site ASAP),Proceedings of TOFE(preprint to be distributed at TOFE),ANS Newsletter,December 2019,Oral presentations,TOFE invited talk,9/30/08,ARIES HHFC workshop,12/10/08,FESAC meeting,if rescheduled,Plans to present TRL methodolo,4,UCSD-CER-08-01,University of California,San Diego,UCSD-CER-08-01University of Ca,5,Current Status,UCSD-CER-08-01,70 pages,95%complete,under final review,evaluation of current TRL,with ITER,role of CTF,TOFE paper,8 pages,95%complete,same as interim report,selected tables presented due to space limitation,1.plasma power flows,2.tritium control,3.plasma control,ANS Newsletter,Due November 1,TOFE talk,Complete draft,to be shown today,ARIES HHFC,Same as TOFE,except more emphasis on HHFC,FESAC talk,Partial draft,to be integrated with Raffrays work?,May require some revisions,depending on the prevailing state of affairs.,No date.,Current StatusUCSD-CER-08-017,6,An evaluation of fusion energy R&D gaps using technology readiness levels,M.S.Tillack,A.D.Turnbull,L.M.Waganer,S.Malang,D.Steiner,J.P.Sharpe,L.C.Cadwallader,L.El-Guebaly,A.R.Raffray,F.Najmabadi,R.J.Peipert Jr,T.L.Weaver and the ARIES Team,18,th,Topical Meeting on the Technology of Fusion EnergySan Francisco,CA September 28 October 2,2019,An evaluation of fusion energy,7,The topic of fusion energy R&D gaps is seeing increased attention in the US and worldwide,page 1 of 15,In EU and Japan,the“broad approach”and“fast track”activities have placed additional attention on R&D,gaps,In the US,DOE and FESAC initiated a series of panels andworkshops to respond to requests for a coherent program plan.,The ARIES Pathways study began in 2019 to evaluate R&Dneeds and gaps for fusion from ITER to Demo.,In this study we adopted and tested a methodology forevaluating R&D needs that is widely recognized,outside,of the fusion community.,Initial efforts to develop and apply this technology assessmentapproach for fusion energy are reported here.,The topic of fusion energy R&D,8,Development of TRLs is one element of the ARIES“Pathways”Program,What are the remaining major R&D areas?,What is the data base needed to field a commercial power plant(including licensing,operations,reliability,etc,.)?,Which of the remaining major R&D areas can be explored in existing devices or simulation facilities(,i.e.,fission reactors)?,What is the impact of each R&D item on the attractiveness of the final product(metrics for prioritization of R&D)?,What other major facilities are needed?,What are the possible embodiments for CTF and what are the their cost/performance attributes?,The goal is to develop,quantitative,metrics in each area.,page 2 of 15,Development of TRLs is one el,9,We adopted“readiness levels”as the basis for our R&D evaluation methodology,TRL,Category,Generic Description,1,Concept Development,Basic principles observed and formulated.,2,Technology concepts and/or applications formulated.,3,Analytical and experimental demonstration of critical function and/or proof of concept.,4,Proof of,Principle,Component and/or bench-scale validation in a laboratory environment.,5,Component and/or breadboard validation in a relevant environment.,6,System/subsystem model or prototype demonstration in relevant environment.,7,Proof of Performance,System prototype demonstration in an operational environment.,8,Actual system completed and qualified through test and demonstration.,9,Actual system proven through successful mission operations.,page 3 of 15,TRLs express increasing levels o
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