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,单击此处编辑母版标题样式,单击此处编辑母版文本样式,第二级,第三级,第四级,第五级,*,IDF工序缺陷判断及质量数据分析,SYE QE 08.02.25,IDF工序缺陷判断及质量数据分析SYE QE 08.02,1,培训目的,了解IDF工序,现阶段质量监控点、主要质量问题、缺陷形态、可能产生原因,了解IDF工序主要质量数据和指标,了解IDF工序质量数据分析、改善及效果评估,培训目的了解IDF工序现阶段质量监控点、主要质量问题、缺陷,2,一、I,DF工序,主要质量问题、缺陷形态、可能产生原因、现阶段质量监控点,纲要:,1、IDF工序现阶段主要质量监控点及监控参数;,2、流程查核;,一、IDF工序主要质量问题、缺陷形态、可能产生原因、现阶段质,3,一、I,DF工序,主要质量问题、缺陷形态、可能产生原因、现阶段质量监控点,1、IDF工序现阶段主要质量监控点:,具体见附件,一、IDF工序主要质量问题、缺陷形态、可能产生原因、现阶段质,4,一、,IDF工序,主要质量问题、缺陷形态、可能产生原因、现阶段质量监控点,2、主要参数及质量监控点:,前处理:1、,速度(2.0-2.7m/min),2、烘干,温度(45-55),3、微蚀量:0.8-1.6u,m,贴膜:1、贴膜温度/压力(11010、kg/cm,2,),2、预热温度(805)、贴膜速度:电镀板(2.0-2.m/min),其它(3.0-3.m/min),3、贴膜后静止时间(15-1440min),曝光:1、曝光级数(干膜:7-8、湿膜:6.5-7.5、MASK2:4-5)、,能量均匀性(10%)、真空度(25-30inHg),2、曝光时间(15s)、温湿度(201、46-54%RH)、,曝光后静止时间(15-1440min),一、IDF工序主要质量问题、缺陷形态、可能产生原因、现阶段质,5,一、,IDF工序,主要质量问题、缺陷形态、可能产生原因、现阶段质量监控点,湿油:1、,速度(2.0-3.5m/min),2、油墨粘度(40-62sec),3、膜厚:9-13um,4、洁净度:涂膜室1000 grade,菲林制作及使用:1、菲林剖出至使用最小时间:4H,2、保护膜贴膜速度:1.5-2刻度,3、存放条件:,温湿度(201、,46-54%RH),),一、IDF工序主要质量问题、缺陷形态、可能产生原因、现阶段质,6,一、,IDF工序,主要质量问题、缺陷形态、可能产生原因、现阶段质量监控点,3、工序查核,(1)日常查核,(2)专项查核,一、IDF工序主要质量问题、缺陷形态、可能产生原因、现阶段质,7,二、IDF工序主要质量指标,纲要:,1、报废率,2、PONC,3、一次合格率,4、RTV,5、重点客户/型号,二、IDF工序主要质量指标纲要:,8,二、IDF工序主要质量指标,工序主要质量数据:,质量控制项目,目标,数据来源,频率,主要影响缺陷,一次合格率,65%、77%、80%、85%,ERP,ERP日报、周报、月报,开路缺口、曝光不良、残铜、凸起,报废率,普通板,4.3,MRB,ERP日报、周报、月报,AOI开路缺口、短路、擦花,HDI板,4.3,PONC,185万/月,QE,PONC月报,膜碎开路缺口、短路、擦花,ET合格率,内短,1.1%,ET,ERP日报、月报,开路缺口、短路、残铜,内开,0.3,大点,0.3,客户投诉DPPM,内层开路,20,QS,QS月报表,内层开路缺口、短路,内层短路,10,二、IDF工序主要质量指标工序主要质量数据:质量控制项目目标,9,二、IDF工序主要质量指标,1、普通板及HDI板报废率:,A、曝光房每周普通板报废率趋势:,缺陷,目标,04/01-07,04/08-14,04/15-21,04/22-28,04/29-05,合格面积,ft,2,37684.56,377048.3,401362.3,406714.9,382405.7,开路缺口,报废面积,ft,2,5223.56,6705.94,6520.66,5816.78,7362.13,开路缺口,报废率,%,1.75,1.42,1.78,1.62,1.43,1.93,曝光不良,报废面积,ft,2,684.9,916.85,522.93,341.94,713.31,曝光不良,报废率,%,0.15,0.19,0.24,0.13,0.08,0.19,重合度报废面积,ft,2,66.02,85.05,48.77,196.24,75.51,重合度报废率,%,0.05,0.02,0.02,0.01,0.05,0.02,二、IDF工序主要质量指标1、普通板及HDI板报废率:缺陷目,10,二、IDF工序主要质量指标,曝光房每周普通板报废率趋势:,报废率是工序最重要的质量指标!,二、IDF工序主要质量指标曝光房每周普通板报废率趋势:,11,二、IDF工序主要质量指标,B、,DES每周普通板报废率趋势,:,缺陷,目标,04/01-07,04/08-14,04/15-21,04/22-28,04/29-05,合格面积,ft,2,37684.56,377048.3,401362.3,406714.9,382405.7,AOI残铜,报废面积,ft,2,294.16,182.65,141.14,163.61,180.49,AOI残铜,报废率,%,0.05,0.08,0.05,0.04,0.04,0.05,蚀刻过度,报废面积,ft,2,68.87,126.88,93.86,209.33,72.55,蚀刻过度,报废率,%,0.03,0.02,0.03,0.02,0.05,0.02,蚀刻不净,报废面积,ft,2,93.16,75.15,93.75,195.02,213.32,蚀刻不净,报废率,%,0.05,0.03,0.02,0.02,0.05,0.06,叠/卡板报废面积,ft,2,153.77,204.91,104.76,176.51,150.5,叠/卡板报废率,%,0.05,0.04,0.05,0.03,0.04,0.04,阻值超标报废面积,ft,2,25.22,4.31,9.16,7.21,11.99,阻值超标报废率,%,0.02,0.02,0.003,0.01,0.01,0.01,特阻抗不合格报废面积,ft,2,1.26,2.15,11.28,6.12,6.12,特性阻抗不合格报废率,%,0.01,0,0,0.01,0.01,0.01,二、IDF工序主要质量指标B、DES每周普通板报废率趋势:缺,12,二、IDF工序主要质量指标,DES每周普通板报废率趋势:,报废率是工序最重要的质量指标!,二、IDF工序主要质量指标DES每周普通板报废率趋势:,13,二、IDF工序主要质量指标,C、,AOI,每周普通板报废率趋势:,缺陷,目标,04/01-07,04/08-14,04/15-21,04/22-28,04/29-05,内层余数合格面积,ft,2,37684.56,377048.3,401362.3,406714.9,382405.7,内层余数报废面积,ft,2,947.11,684.4,893.32,630.24,826.98,内层余数报废率,%,0.2,0.26,0.17,0.22,0.15,0.22,普通板RTV合格面积,ft,2,109664.75,118578.1,106612.66,111578.19,91139.66,内层短路,报废面积,ft,2,1151.16,1182.96,1039.43,1043.58,845.45,内层短路,报废率,%,1.1,1.03,0.98,0.96,0.92,0.91,内层开路,报废面积,ft,2,315.58,342.75,259.11,355.33,253.01,内层开路,报废率,%,0.3,0.28,0.28,0.24,0.31,0.27,大点内短报废面积,ft,2,470.68,464.88,355.18,351.66,285.59,大点内短报废率,%,0.3,0.42,0.38,0.33,0.31,0.31,二、IDF工序主要质量指标C、AOI每周普通板报废率趋势:,14,二、IDF工序主要质量指标,AOI,每周普通板,报,废率趋势:,报废率是工序最重要的质量指标!,二、IDF工序主要质量指标AOI每周普通板报废率趋势:,15,二、IDF工序主要质量指标,D、曝光房每周HDI报废率趋势:,缺陷,目标,04/01-07,04/08-14,04/15-21,04/22-28,04/29-05,T/C合格面面,ft,2,23976.2,16460.13,18264.88,16928.6,13068.4,T/C开路缺口,报废面积,ft,2,96.75,100.5,52.33,69.84,55.65,T/C开路缺口,报废率,%,0.2,0.4,0.6,0.28,0.41,0.42,T/C曝光不良,报废面积,ft,2,56.88,29.08,35.38,14.1,20.85,T/C曝,光不良,报废率,%,0.03,0.24,0.17,0.19,0.08,0.16,电镀子板合,格面面,ft,2,21183.79,16371.21,17937.40,17177.91,12757.86,电镀子,开路缺口,报废面积,ft,2,218.09,307.01,382.89,527.93,258.14,电镀子,开路缺口,报废率,%,1.4,1.03,1.88,2.13,3.07,2.02,电镀子,曝光不良,报废面积,ft,2,13.98,40.74,42.54,21.03,9.97,电镀子,曝光不良,报废率,%,0.15,0.07,0.25,0.24,0.12,0.08,电镀子崩孔报,废面积,ft,2,39.2,69.09,52.75,50.69,26.6,电镀子,崩孔报废率,%,0.1,0.19,0.42,0.29,0.30,0.21,二、IDF工序主要质量指标D、曝光房每周HDI报废率趋势:缺,16,二、IDF工序主要质量指标,曝光房每周HDI报废率趋势:,报废率是工序最重要的质量指标!,二、IDF工序主要质量指标曝光房每周HDI报废率趋势:,17,二、IDF工序主要质量指标,E、DES每周HDI板报废率趋势,:,缺陷,目标,04/01-07,04/08-14,04/15-21,04/22-28,04/29-05,T/C合格面积,ft,2,23976.2,16460.13,18264.88,16928.6,13068.4,T/CAOI残铜,报废面积,ft,2,9.7,6.99,0.22,1.03,0.96,T/C,AOI残铜,报废率,%,0.03,0.04,0.04,0,0.01,0.01,T/C,蚀刻过度,报废面积,ft,2,8.71,2.24,20.22,2.21,2.35,T/C,蚀刻过度,报废率,%,0.01,0.04,0.01,0.11,0.01,0.02,T/C,蚀刻不净,报废面积,ft,2,0.63,2.37,2.71,0.91,0.89,T/C,蚀刻不净,报废率,%,0.02,0,0.01,0.01,0.01,0.01,电镀子板合,格面积,ft,2,21183.79,16371.21,17937.40,17177.91,12757.86,电镀子板,AOI残铜,报废面积,ft,2,19.02,10.38,15.97,19.58,16.45,电镀子板,AOI残铜,报废率,%,0.1,0.06,0,0.03,0.11,0.13,电镀子板,蚀刻过度,报废面积,ft,2,12.53,0.61,5.02,6.57,0,电镀子板,蚀刻过度,报废率,%,0.05,0.06,0,0.03,0.04,0,电镀子板,蚀刻不净,报废面积,ft,2,6.24,8.69,4.99,7.92,23.10,电镀子板,蚀刻不净,报废率,%,0.20,0.03,0.05,0.03,0.05,0.18,二、IDF工序主要质量指标E、DES每周HDI板报废率趋势:,18,二、IDF工序主要质量指标,DES每
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