Vacuum机台专用名词

A0 粗略真空（rough vacuum）760torr1torr 中度真空(medium vacuum)1torr10-3torr 高真空 (high vacuum)10-3torr10-7tor 超高真空(ultra-high vacuum)10-7torr以上 -7-3ATM PIG High PIG Low IG High IG LowVacuum chamberCompressorunitRPIGPiG2PS2PiG1MVMBPS1v1v2N2N2v4Helium gas flowCooling waterCryo-uRBHRV2RV3RV1v3PRN21.第一級冷凝500K800K 水氣與二氧化碳。2.第二級冷凝10200K 氮氣、氧氣、氬氣。3.活性炭吸附級 氫氣、氦氣、氖氣。Cryo PumpGasHe.Low TempHe.High TempCooling WaterFirst CondensationSecond CondensationGasWater inWater outCompressorOil filterAbsorberStart up rege.Close main valveShut off cryopumpBand heater onIntroduce dry N2Atm pressurePurge dry N2Complete warm upStop dry N2yesyesnonoRough pump the cryopumpComplete rough pumpBand heater offnoyesStart up cryopumpComplete cool downComplete rege.noyes