QCC短路圈会成果报告

按一下以編輯母片標題樣式,按一下以編輯母片,第二層,第三層,第四層,第五層,*,QCC短路圈會,圈會成員：,圈長：賴國城,輔導員：黃貴煥,圈員：陳俊廷、龔靖城,陳溢群、陳建銘,方麒銘,1,工作進度,六月:,收,收集不良樣,本,本，層別不,良,良原因。,七月:,對,對策實施、,數,數據確認、,對,對策修正。,八月:,全,全品目水平,展,展開。,九月:,對,對策數據確,認,認與修正。,2,對策品目選,定,定,依據每月計,劃,劃投入LOT數及LOT不良,率，我們選,定,定兩個對策,品,品目:,FD0475,FS0512,3,不良現況,依據取樣1142 PCS觀察分,析,析，層別出,目,目前FD0475與FS0512,主,主要有下列,不,不良現況:,1.銅面上,有,有異物沾附(膜屑)，,導,導致銅材未,被,被氯化銅攻,擊,擊,2.蝕刻不,淨,淨,3.其他因,素,素,4,銅面上異物,沾,沾附(膜屑):70.3%,5,蝕刻不淨:19.1%(FS0512),6,其他因素:10.6%,7,膜屑反沾,8,問題層別,我們將顯像,後,後的製品烘,乾,乾，用顯微,鏡,鏡觀察發現,，,，有大量膜,屑,屑沾附。,9,觀察顯像後,水,水洗槽的濾,網,網，發現大,量,量膜屑被帶,出,出。,10,我們取樣5,月,月份週保前,後,後各5 LOTs做比,對,對,資料來源:ERP,週保前,日期,品目,製番,銅殘,短路,LOT不良率,5月9日,FS0553,9505-00565,0,7,3.50%,9505-00566,1,3,2.00%,9505-00567,0,3,1.50%,9505-00568,0,3,1.50%,9505-00569,3,4,3.50%,5月14日,FS0593,9505-02722,0,7,0.29%,9505-02723,0,3,0.13%,9505-02724,0,10,0.42%,9505-02725,8,3,0.46%,9505-02726,0,4,0.17%,5月21日,FS0553,9505-07155,0,3,1.50%,9505-07156,1,3,2.00%,9505-07157,2,2,2.00%,9505-07158,0,2,1.00%,9505-07159,1,2,1.50%,平均LOT不良率:,1.43%,11,單位:Pcs,週保後,日期,品目,製番,銅殘,短路,LOT不良率,5月9日,FS0282,9505-01335,0,3,0.03%,9505-01336,0,6,0.06%,9505-01337,0,0,0.00%,9505-01338,1,2,0.03%,9505-01339,0,3,0.03%,5月14日,FS0696,9505-04280,0,2,0.10%,9505-04281,0,0,0.00%,9505-04282,0,2,0.10%,9505-05265,0,4,0.20%,9505-05266,0,2,0.10%,5月21日,FS0633,9504-15837,0,0,0.00%,9504-15838,0,0,0.00%,9504-15839,0,0,0.00%,9504-15840,0,1,0.01%,9504-15841,0,0,0.00%,平均LOT不良率:,0.04%,12,故我們假設,造,造成短路LOT,不,不良率差異的原因為:,1.濾袋,更,更換，提高,過,過濾效果。,2.藥水,更,更新，提高,顯,顯像能力。,3.滾輪,清,清潔、降低,反,反沾機率。,13,要因分析:膜屑反沾,人,濾網清洗未落實，濾袋更換未落實。,機,過濾效果不佳，滾輪排列設計不佳。,料,濾袋、濾網網目過大，,法,藥水老化，自動定量效果不佳。,14,對策:,1.變更滾,輪,輪排列，減,少,少實心滾輪,使,使用,2.增加顯,像,像藥液、濾,心,心濾袋更換,頻,頻度,3.建浴室,建,建浴程序標,準,準化,4.調整自,動,動添加系統,，,，維持藥水,穩,穩定,15,變更滾輪排,列,列,變更前,變更後,將原有放置,於,於顯像槽與,水,水洗槽間之,實,實心滾輪，,變,變更為輪片,式,式滾輪，減,少,少滾輪與製,品,品接觸面積,，,，降低異物,反,反沾之機率,。,。將水質PH值控制於7.5以上，防止,弱,弱酸水質與,帶,帶出的顯影,液,液再反應。,16,資料來源:ERP,單位:Pcs,對策前,對策後,製番批號,短路,銅殘,LOT不良率,製番批號,短路,銅殘,LOT不良率,9505-09947,14,0,0.88%,9506-00795,10,0.63%,9505-09948,33,0,2.06%,9506-00803,13,0.81%,9505-09949,9,9,1.13%,9506-00798,8,0.50%,9505-09950,10,3,0.81%,9506-00804,11,0.69%,9505-09954,26,0,1.63%,9506-00796,9,0.56%,9505-09953,23,1,1.50%,9506-00801,14,0.88%,9505-09958,10,0,0.63%,9506-03239,10,0.63%,9505-09961,4,0,0.25%,9506-03240,11,0.69%,9505-09962,15,0,0.94%,9506-03241,13,0.81%,9505-09963,20,8,1.75%,9506-03246,7,0.44%,9505-09965,17,0,1.06%,9506-03251,13,0.81%,9505-09967,12,11,1.44%,9506-03253,7,0.44%,LOT不良率平均:,1.17%,LOT不良率平均:,0.66%,總投入:19200 pcs,總投入:19200 pcs,我們測試了12 LOTS，並與,測,測試前做比,對,對。,17,變更濾網網,目,目,我們將顯像,後,後水洗槽原,本,本使用25,網,網目的濾罐,更,更換為48,網,網目，藉以,提,提高過濾效,果,果,。,18,濾網變更後,，,，仍有大量,膜,膜屑帶出,分析藥水老,化,化與溶膜量,19,顯像藥液:,DOWN槽,後,後，追蹤其,葯,葯液變化發,現,現，自動添,加,加系統無法,維,維持穩定的,作,作業濃度。,取樣時間,2006/8/11 13:00,2006/8/11 18:30,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,10.42,0.96%,10.81,0.84%,雙面顯影槽,10.53,0.89%,10.85,0.87%,取樣時間,2006/8/12 07:30,2006/8/12 13:10,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,10.88,0.87%,10.85,0.87%,雙面顯影槽,10.68,0.83%,週保養,取樣時間,2006/8/15 08:20,2006/8/15 12:30,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,10.99,0.96%,11,0.97%,雙面顯影槽,10.97,0.99%,10.98,0.92%,取樣時間,2006/8/16 08:50,2006/8/16 15:20,PH值,碳酸鈉濃度,PH值,碳酸鈉濃度,單面顯影槽,11.04,0.98%,11.12,0.91%,雙面顯影槽,11.03,1.00%,11.09,0.89%,20,根據DRYFILM,供,供應,商,商華,立,立的,建,建議:,25um,厚,厚度,的,的DRYFLIM藥,水,水實,際,際溶,膜,膜量(S)要0.4m,2,/L,20um,厚,厚度,的,的DRYFLIM藥,水,水實,際,際溶,膜,膜量(S)要0.5m,2,/L,依廠,內,內生,產,產品,目,目去,做,做估,算,算:,0.25m*0.3m*30%(被,溶,溶蝕,率,率)*100(張,數,數)=2.25m,2,/lot,1000(,槽,槽,體,體積)*0.5=500m,2,1000(,槽,槽,體,體積)*0.4=400m,2,500/2.25=222lots,20um,厚,厚DRYFILM(單,面,面板),400/2.25=177lots,25um,厚,厚DRYFILM(雙,面,面板),再導,入,入每,班,班產,出,出量:,單面,板,板:70lots/,班,班,222/70=3.17,班,班(,約,約1.5天),雙面,板,板:40lots/,班,班,177/40=4.43,班,班(,約,約2.5天),21,我們,依,依據,華,華立,提,提供,的,的滴,定,定方,法,法，,量,量測,單,單面,板,板機,台,台顯,影,影槽DOWN,槽,槽前,、,、後,實,實際,溶,溶膜,量,量。,DOWN槽前一日(12:00)取樣滴定,S=,0.37789,DOWN槽後(09:00)取樣滴定,S=0.13966,DOWN槽後一日(10:00)取樣滴定,S=,0.31217,DOWN槽後一日(16:00)取樣滴定,S=,0.39432,單面,蝕,蝕刻,機,機(S0.5),22,增加DOWN,槽,槽頻,度,度、,濾,濾袋,更,更換,頻,頻度,。,。,1.,先,先開,立,立暫,定,定條,件,件，,增,增加DOWN,槽,槽頻,度,度，,提,提高,藥,藥水,溶,溶膜,能,能力,。,。,2.,增,增加,濾,濾袋,更,更換,頻,頻度,，,，增,加,加顯,像,像槽,過,過濾,能,能力,。,。,23,設定補充秒數,設定間隔秒數,實際補充秒數,實際間隔秒數,CYCLE TIME,實際補充量,預估每日補充量,中繼次數,10,30,10,60,70,625ml,771.43 L,1234,20,30,20,60,80,1250ml,1350 L,1080,30,30,30,60,90,1980ml,1900.8 L,960,10,10,10,40,50,625ml,1080 L,1728,10,20,10,50,60,625ml,900 L,1440,10,30,10,60,70,625ml,771.43 L,1234,單面,蝕,蝕刻,機,機顯,象,象中,繼,繼槽,作,作動,測,測試,24,設定補充秒數,設定間隔秒數,實際補充秒數,實際間隔秒數,CYCLE TIME,實際補充量,預估每日補充量,中繼次數,10,30,10,60,70,475ml,586.29 L,1234,20,30,20,60,80,980ml,1058.40 L,1080,30,30,30,60,90,1450ml,1566 L,960,10,10,10,40,50,475ml,820.8 L,1728,10,20,10,50,60,475ml,640 L,1440,10,30,10,60,70,475ml,586.29 L,1234,雙面,蝕,蝕刻,機,機顯,象,象中,繼,繼槽,作,作動,測,測試,25,建浴,室,室:,在,在自,動,動添,加,加的,測,測試,中,中發,現,現建浴,室,室顯,像,像藥,水,水的,調,調配,程,程序,未被,標,標準,化,化，影,響,響測,試,試的,準,準確,性,性。,26,在調,整,整自,動,動添,加,加量,的,的過,程,程，,我,我們,導,導入,了,了PH值,作,作為,顯,顯像,藥,藥水,老,老化,與,與否,的,的判,定,定依,據,據。,條件,一,一、,自,自動,添,添加,設,設定10,秒,秒，,間,間隔10,秒,秒,單面,機,機台:,每,每,次,次補,充,充量625ml,，,，平,均,均PH值,為,為10.57,雙面,機,機台:,每,每,次,次補,充,充量475ml,，,，平,均,均PH值,為,為10.49,條件,二,二、,自,自動,添,添加,設,設定30,秒,秒，,間,間隔30,秒,秒,單面機,台,台:,每,每次,補,補充量1980ml，平,均,均PH,值,值為11.12,雙面機,台,台:,每,每次,補,補充量1450ml，平,均,均PH,值,值為11.09,藥水商,給,給的建,議,