MEMS数字麦克风基本知识课件

MEMS(,数字,),麦克风基本知识,MEMS Microphone,产品简介,MEMS,麦克风是由,MEMS,微电容传感器、微集成转换电路,(,放大器,),、声腔及,RF,抗噪电路组成。,MEMS,微电容极头部分包含接收声音的硅振膜和硅背极,硅振膜可直接将接收到的音频信号经,MEMS,微电容传感器传输给微集成电路,微集成电路可将高阻的音频电信号转换并放大成低阻的音频电信号,同时经,RF,抗噪电路滤波,输出与手机前置电路相匹配的电信号,.,完成“声,-,电”转换,.,MEMS,Microphone,工作原理,MEMS Microphone,产品简介,V,out,Silicon,Back Plate,Silicon,diaphragm,GND,RF Filter,MEMS,Microphone Module Structure,V,supply,MEMS Acoustic Sensor,ASIC,MEMS Microphone,产品简介,MEMS,Wafer,MEMS Die,MEMS,Microphone,Wafer&MEMS Die,MEMS Microphone,产品简介,MEMS,Microphone,Profile,Acoustic port hole,L,W,H,4,2,1,3,PIN#FUNCTION,1.OUTPUT,2.NO CONNECTION,3.GROUND,4.POWER,MEMS Microphone,产品简介,序号,名称,1,Cover,2,Housing,3,Wire bonding,4,PC Board,5,Capacitor 10pF,6,Capacitor 33pF,7,ASIC,8,MEMS Die,MEMS,Microphone,Structure,1,2,3,6,7,8,5,4,MEMS Microphone,产品简介,Specification,MEMS Microphone,Frequency range,100-10,000Hz,Sensitivity(0dB=1V/Pa 1k Hz),-42dB+/-3dB,Output impedance,58dB,RF-filtering capacitance,10pF,33pF,both or none,Change in sensitivity(,电压特性,),1dB across voltage range,Standard operating temperature,-40 to+100,Current consumption,0.25mA,Supply voltage ratings,1.5V to 3.6V,Performance Comparison,MEMS Microphone,产品简介,Recommended Interface Circuit,AAC MEMS Microphone,Term3.,Term2.,Term4,Term1,-,+,Vref,External Gain=-R1/R2,(Set by customer),+,R2,R1,MEMS Microphone,产品简介,Solder Reflow Profile,Maximum solder profile:Do not exceed profile listed in this table,Stage,Temperature Profile,Time(Maximum),Pro-head,170180,120sec.,Solder Melt,Above 230,100sec.,Peak,260,Maximum,30sec.,Incoming Inspection,Wafer Sawing,Wafer Expand,SMT/glueing,Packaging/Cutting,Testing/Marking/Taping,Shipping Inspection,Packing,Wafer Fabrication,Packaging,Wafer Foundry,Pick up and place MEMS,Wire Bonding,Reliability Test,Wafer Testing,Wafer,Inspection,Production Process,MEMS Microphone,MEMS Microphone,产品简介,Cellular Phone(CDMA,GSM,PCS),Camcorder Phone,MP3 Phone,PDA Phone etc.,Camcorder,Digital Camera etc.,Ear Phone MIC for Headsets,MP3,Bluetooth,etc.,Notebook Computer,Desk-Top Computer,Video Door Phone etc.,Cordless Phone,MEMS,Wafer Fab,.,MEMS Packaging,Application of Product,MEMS Microphone,产品简介,MEMS Mic,MEMS Mic,Application of Product,