光学薄膜基本原理与应用课件

按一下以編輯母片標題樣式,按一下以編輯母片,第二層,第三層,第四層,第五層,光学薄膜基本原理与应用课件,*,R& D dept. /Andy Yu,Fundamentals Of Optical Coating,& Application,1,光学薄膜基本原理与应用课件,Newton(1666年) -光的微粒說(Corpuscular theory),光是由發光物體發射出來的,以非常微小的粒子做高速運動,用微粒說解釋光在均勻介質中的直線傳播,光在界面上的反射,折射;確無法解釋光的繞射,干涉,偏振現象,Huygens(1679年)-波動說(wave theory),光是在整個空間介質ether中傳播的某種彈性波,用波動說解釋光的傳播速度;用波動說推出反射定律與折射定律,並解釋方解石的雙折射現象,發現了光的偏振現象,Young(1801年)-楊氏雙狹縫干涉實驗,出現明暗相間的條紋(微粒說無法解釋),(波動說確可圓滿解釋),光是甚麼?,2,光学薄膜基本原理与应用课件,S,S1,S2,M,r,1,r,2,D,P,x,O,=r,2,-r,1,(波程差),d sin=(2k-1)/2,d,(相差 ) =2/=2k k=0,1,2,3,兩束光在P點振幅最大,形成明亮條紋,(相差 ) =2/=(2k-1) k=0,1,2,3,兩束光在P點振幅最小,形成暗紋,楊氏雙狹縫干涉,3,光学薄膜基本原理与应用课件,光的干涉,Constructive interference, R increased,Destructive interference, R decreased,兩列頻率,振幅及振動方向相同,但傳播方向相反的波,疊加形成駐波(Standing Wave),對光波來說,滿足一定條件的兩束光疊加時,在疊加區域,光的強度或明暗有一穩定分佈,4,光学薄膜基本原理与应用课件,RF,Video Frequency,Micro Wave,Infra Red,Visible,UV,X-Ray,-Ray,/Hz,/m,10,4,10,8,10,12,10,16,10,20,3,10,4,3,10,0,3,10,-4,3,10,-8,3,10,-12,400760nm 10,14,10,15,Hz,760nm6,10,4,nm,10,12,10,14,Hz,電磁波譜,5,光学薄膜基本原理与应用课件,薄膜光學 (Thin Film Optics),光學薄膜是一種用於改變光波傳遞特性的光學元件,光學薄膜是由特定光學常數和厚度的分層介質所組成,薄膜光學的理論基礎是,干涉光學(Interference),光束將在每一個界面 上多次反射,因此涉及到大量光束疊加問題;,有效的計算方法:,(1)矩陣法,(2)等效導納遞推法,-將所有膜層等效成一個界面,用總的反射反射係數和位相來表示,理想的光學薄膜:,(1) 光學薄膜層與層之間相互平行,(2) 介面光滑且界線分明,6,光学薄膜基本原理与应用课件,a,ar,atrt,Atr,3,t,Atr,5,t,Atr,7,t,atr,Atr,3,Atr,5,Atr,7,at,Atr,2,Atr,4,Atr,6,d,att,Attr,2,Attr,4,Attr,6,1,2,3,4,5,1,2,3,4,薄膜干涉,透射光振幅,反射光振幅,炫麗的彩色膜,因薄膜的兩個表面反射光互相干涉而產生的,7,光学薄膜基本原理与应用课件,Optical Admittance,Y(光導納)=H/E(電磁波的磁場與電場之比),Y=N,Yo=(n-ik) Yo,Yo (,自由空間之導納),單層光學薄膜的特徵矩陣:,cos, i sin /Y,iY sin cos ,I=,-1,(相厚度 phase thickness)=2 nd cos/,D=膜層的幾何厚度,Ea,Ha,=,Eb,Hb,薄膜的特徵矩陣,8,光学薄膜基本原理与应用课件,cos, i sin /N,iN sin cos ,B,C,=,1,Ns,Quarter wave (1/4),o,= /2,M=,0 i/N,iN 0,Half wave (1/2),o,= ,1 0,0 1,M=,Absentee layer,Y(光導納)=H/E(電磁波的磁場與電場之比)=C/B,1,Ns,N,E,=C/B= N,2,/Ns,1,Ns,9,光学薄膜基本原理与应用课件,Equivalent admittance(,等效導納,),Y,E,=C/B,B和C分別正比於電場(E)及磁場(B),反射光振幅,(amplitude of reflection coefficient),=E,r,/E,i,=(Y,0,-Y,1,),/(Y,0,+Y,1,),=,(N,0,-N,1,),/ (N,0,+N,1,),反射率,R,=,= (Y,0,-Y,1,/Y,0,+Y,1,),2,R,=(,(N,0,-N,1,),/ (N,0,+N,1,),2,(E,r,/E,i,;反射強度與入射強度之比),For dielectric N,s,=n,s,e.g BK7 n,s,=1.52,R=(,(n,0,-n,1,),/ (n,0,+n,1,),2,=4.26%,For metal N,s,=n,s,-ik,s,N,s,=0.82-i5.99 550nm,R=(,(n,0,-n,1,),2,+k,2,/ (n,0,+n,1,),2,+k,2,),=91.6%,10,光学薄膜基本原理与应用课件,穿透光振幅,(amplitude of transmission coefficient),穿透率,T=4,0,s,/,(,0,B + C) (,0,B + C),=,E,t,/E,i,=2Y,0,/(Y,0,+Y,1,),=2,N,0,/ (N,0,+N,1,),=2,0,/,0,B + C,T=4,n,0,n,s,/(,n,0,+n,s,),2,1 = T + R +L(S+A),11,光学薄膜基本原理与应用课件,n1,n2,n3,n,1,-n,2,n,1,+n,2,n,2,-n,3,n,2,+n,3,=,Single Layer ARC,若薄膜的兩個表面光振幅相等,相位相反,則兩反射光相互抵消,透射光就增強了,n,2,= (n,1,n,3,),1/2,n,1,=1, n,3,=1.5,n,2,=1.225,12,光学薄膜基本原理与应用课件,y,0,y,1,y,2,1,/y,sub,y,sub,Without ARC,R=,(,(y,0,-y,s,),/ (y,0,+y,s,),2,BK7=1.52,=(1-1.52)/1+1.52),2,=4.26%,Without ARC,13,光学薄膜基本原理与应用课件,Single Layer ARC,R=(y,0,-y,1,2,/y,sub,)/ (y,0,+y,1,2,/y,sub,),2,Idea ARC ,R=0,y,0,-y,1,2,/y,sub,=0,y,1,=(y,0,y,sub,)1/2,y,0,=1.0 Air, y,sub,=1.52,y,1,=1.23,R=(y,0,-y,2,f,/y,s,)/ (y,0,+y,2,f,/y,s,),2,R=(1.00-1.38,2,/1.52)/ (1.00+1.38,2,/1.52),R=1.23%,14,光学薄膜基本原理与应用课件,y,H=,y,5,y,H=,y,3,y,H=,y,1,y,L=,y,4,y,L=,y,2,y,2,H,y,2,H,y,2,H,y2,L,y2,L,y,sub,y,o,y,sub,Y1=y,2,H,/ y,sub,Y2=y,2,L,/ Y1,= y,2,L,y,s,/y,2,H,Y3=y,2,H,/ Y2,= y,4,H,/ y,2,L,y,s,y,2,1,y,2,3,y,2,5,y2,2,y2,4,y,s,Odd layer,y,0,y,E,y,0,y,E,=,等效導納(遞推法),15,光学薄膜基本原理与应用课件,n,air,n,L,n,H,n,S,1,2,3,N,air,n,L,n,s,光密介質進入光疏介質;,相位沒有變化,HL雙層減反射膜,反射率可降至0.05%以下,16,光学薄膜基本原理与应用课件,2.352,1.452,1,2,1.52,N=1.38,n=2.2,0.5,0,1.52,2,+2.2,2,2,1.52,1+1.38,2,2,1,圓心2.352=,圓心1.452=,通過(1.52,0),通過(1,0),導納軌跡圖,17,光学薄膜基本原理与应用课件,ARC with Two Layer,R=(y,0,-y,1,2,y,sub,/y,2,2,)/ (y,0,+y,1,2,y,sub,/y,2,2,),Idea ARC R=0,y,0,-,y,1,2,y,sub,/y,2,2,=0;,y,1,2,/y,2,2,=y,0,/ y,sub,Y,2,=y,1,(y,s,/y,0,),1/2,=(,1.38 1.23),1/2,y,2,=1.7,R=(y,0,-y,1,2,y,sub,/y,2,2,)/ (y,0,+y,1,2,y,sub,/y,2,2,),R=(1.00-1.38,2,1.52/1.7,2,)/ (1.00+ 1.38,2,1.52/1.7,2,),=(1-1.00162) /(1+1.00162),=0.81%,18,光学薄膜基本原理与应用课件,High Reflected Mirror,19,光学薄膜基本原理与应用课件,High Reflection Mirror,y,s,/HLHLHLHLH.H/,y,0,=,y,s,/ (HL),P,H/,y,0,y,E,=,y,H,2(p+1),/=,y,L,2p,y,s,R= (,y,0,-y,E /,y,0,+,y,E,),2,y,s,=1.52,y,H,=2.3,yL=1.46,yo=1 ,p=8 R=?,99.92%,g=4/Sin,-1,(y,H,- y,L,/y,H,+ y,L,),G=,0,/ , = g/g=170nm,20,光学薄膜基本原理与应用课件,High Reflection Mirror,21,光学薄膜基本原理与应用课件,High Reflection Mirror,22,光学薄膜基本原理与应用课件,S 分量,P分量,稜鏡偏振鏡,:1.65/(HL),5,H/1.65,0=500nm,=45,23,光学薄膜基本原理与应用课件,24,光学薄膜基本原理与应用课件,W=,R,+,G,+,B,M,=,R,+,B,Y,=,R,+,G,C,=G+,B,C,=W-,R,Y,=W-,B,M,=W-,G,Color(加法三原色),25,光学薄膜基本原理与应用课件,Color(減法三原色 ),C,*,Y,*,M,=BL,R,=,Y,*,M,G,=,Y,*,C,B,=,M,*,C,26,光学薄膜基本原理与应用课件,Dichroic Mirror,27,光学薄膜基本原理与应用课件,COLOR：,RED,Wavelength 50%：632nm,YELLOW,Wavelength 50%：530nm,Color Filter,28,光学薄膜基本原理与应用课件,COLOR：,GREEN,Wavelength 50%：494/554nm,BLUE,Wavelength 50%：515nm,29,光学薄膜基本原理与应用课件,COLO,LIGHT BLUE,Wavelength 50%：546nm,PURPLE,Wavelength 50%：469/644nm,30,光学薄膜基本原理与应用课件,COL,PINK,Wavelength 50% 452/621nm,COLOR：,LIGHT PINK,Wavelength 50%：487/578nm,31,光学薄膜基本原理与应用课件,Incident Ray,Reflected Ray,Refracted or Transmitted Ray,S,S,S,P,P,P,Surface,Ns =,cos,Np=,/cos,Oblique incidence,1,0,0, Is given by Snells law,P偏振光(TE偏振光)-電場平行於入射平面的偏振光,S偏振光(TM偏振光)-電場垂直於入射平面的偏振光,32,光学薄膜基本原理与应用课件,Rs,Tp,=45,n,0,n,H,n,L,n,H,n,L,n,0,n,0,n,0,MacNeille PBS,H,H,L,PBS偏振分光鏡,隨入射角,增加,P偏振光高低折射率比n,H,/,n,L,愈來愈小,S偏振光高低折射率比愈來愈大,造成/4膜堆P偏振光和S偏振光之高反射區,使P偏振光愈來愈窄S偏振光愈來愈寬;出現S偏振光R很大P偏振光R很小的波域,33,光学薄膜基本原理与应用课件,利用 Brewster angle,B,R,P,=0 ,P偏振光之反射為0,H,=n,H,/cos,H,= ,L,=n,L,/cos,L,Sin,2,H,=n,L,2,/(n,H,+n,L,),tan,H,= n,L,/,n,H,n,H,sin,H,=n,L,sin ,L,依 Snells law,當Prism AOI=45,sin,H,=n,g,sin 45,/,n,H,n,g,2,=2,n,H,2,n,L,2,/,(n,H,2,+n,L,2,),PBS偏振分光鏡,34,光学薄膜基本原理与应用课件,35,光学薄膜基本原理与应用课件,PBS Range:430nm490nm Ts85% AOI :45degree,36,光学薄膜基本原理与应用课件,PBS Range:600nm670nm Ts89% AOI :45degree,37,光学薄膜基本原理与应用课件,What are Optical Thin film can do for an optical system,(1)Reduce reflectance or increase transmittance,(2) Increase reflectance reduce transmittance,(3)Acts as a beam splitter:,Neutral beam splitter,Dichroic Beam Splitter,Polarizer(P-polar light& S- -polar light separation),(4)Spectral Band pass filter(WDM),(5)Long Pass(Cold-Light Mirror) &,Short Pass Filter(Hot Mirror),38,光学薄膜基本原理与应用课件,(6)Energy Control(Solar energy,Absorber),(7)Phase control,(8) Wave guiding(Integrated optics),(9)Optical compensation(Photograph used filter),(10)Anticounterfeiting,(11)Display (Color reflector),(12)Transparent Conductive(ITO),(13)Decoration (UV&IR sunglasses,window illumination),39,光学薄膜基本原理与应用课件,其它熱門鍍膜產品,(1)UV ARC&UV High Transmission film,(2)Rugate Filter,(3)Gradient Index Film,(4)Mosaic Filter,(5)Diamond Like Carbon Film,(6)X-Ray multi-film,40,光学薄膜基本原理与应用课件,投影顯示器用各式分合色片,Dichroic,Mirror,R. G. B.,分合色用,適用不同角度分色,適用,S,或,P,偏極,穿透區平均穿透率 95%,反射區平均反射率 99%,Gradient,Dichroic,Mirror,R. G. B.,分合色用,適用不同角度分色,梯度可調整從 0.1,nm / 1mm,到 1,nm / 1mm,適用,S,或,P,偏極,穿透區平均穿透率95%,反射區平均反射率99%,窄波域反射,mirror,適用於,R.G.B.,各區,適用不同角度,適用各種偏極,平均反射率99%,寬波域反射,mirror,適用於可見光區,適用不同角度,適用各種偏極,平均反射率99%,41,光学薄膜基本原理与应用课件,polarized,x prism,LCD Panel,Dichroic,mirror,lens array plates,p-s converter,Layout of,Reflective LCD Projector,LCD Panel,LCD Panel,Dichroic,mirror,mirror,mirror,mirror,polarized,x prism,polarized,x prism,lamp,Projection lens,42,光学薄膜基本原理与应用课件,(1),多層減反射膜,(2),截止濾光片,(,3)減色濾光片,(4)條帶彩色濾光片,(5)增加熱負載之雙色鏡,(6)非偏振介質分光鏡,(7)非偏振截止濾光片,(8)位相控制鍍膜,(9)低耗損雷射鏡,(10)塑膠減反射膜,(,11)可見光及紅外線雙波減反射膜,性能靈敏度較高鍍膜(價位高),(12)寬帶熱線反射鏡,(13)低發射率鍍膜,43,光学薄膜基本原理与应用课件,價格靈敏度較高鍍膜(價位低),前表面反射鏡,熱線及冷光鏡,人造珠寶,太陽眼鏡鍍膜,顯像器之防炫膜,防仿造鍍膜,建築玻璃鍍膜,44,光学薄膜基本原理与应用课件,光學相關薄膜,PC,太陽眼鏡彩色鍍膜,7,種顏色 (金黃、紫、紅寶石、藍、橘、翡翠、大紅),MIL-M13508,附著性測試及,DIN 58196,鹽水煮沸測試,PMMA,鏡片抗反射鍍膜,硬氧化膜,平均反射率1.5%,MIL-M13508,附著性測試,同相位分光鏡,穿透率 = 50 / 50,反射率 = 70 / 30,雙色濾光鏡,穿透率 90%,阻光率 5%； 過渡波域 10,nm,近紅外穿透鏡,0.40.75,m,平均穿透率 0.05%,0.81.60,m,平均穿透率 95%,玻璃基材可見光域穿透增強膜系,0.40.75,m,穿透率 98.5%,R.G.B.,彩色濾光鏡,CIE,色座標規格誤差：,X， Y0.01,45,光学薄膜基本原理与应用课件,鋁反射鏡,0.3,m0.8m,反射率90%,熱鏡,具備多層膜系保護膜,0.7,m2.5m,反射率95%,0.35,m0.65m,反射率 2.0%,冷光鏡,0.35,m,反射率 2.0%,光纖衰減器鍍膜,SiO,2,TiO,2,保護膜,金屬 / 介質結構,於1.3,m，,反射率 0.5%， 穿透率=50%,46,光学薄膜基本原理与应用课件,導電塑膠及玻璃鍍膜,適用於,LCD,用之,ITO,鍍膜,採用低溫 (85%,阻抗值：50, / cm,2,適用於大面積基板 (,PET：,直徑1,m； glass：0.25m,2,),WDM,濾光片鍍膜,膜層堆疊：全氧化介質多層膜,100,GHz,產品規格,200,GHz,產品規格波長範圍：,C-Band&L,-Bband,S-Band,CWDM,WWDM,BPF,47,光学薄膜基本原理与应用课件,電腦護目鏡,鏡片大小 1421,反射率：平均, 0.60.4% (430640,nm),電磁輻射干擾：, 113% (10500,KHz),靜電防護：可,截紫外線：可,耐刮傷測試：滿足,MIL-C-675C,48,光学薄膜基本原理与应用课件,It transmits the UV rays and reflects the visible to make special fluorescent effects.,Application：,Fluorescent effects for lighting and stage,Ultraviolet Transmission Filter,49,光学薄膜基本原理与应用课件,Ultraviolet Blocking Filters is to transmit much of the visible and infrared. At the same time, efficiently reflecting the ultraviolet region of the spectrum. It is normally used to block the ultraviolet from the visible and near infrared. It also enables the use of a broader range of light sources and reduces photo chemical degradation.,Application：,Natural History Museums,Commercial Art Galleries,The Arts Museums,Ultraviolet Blocking Mirror,50,光学薄膜基本原理与应用课件,Cold Mirrors (Heat Transmitting Mirrors) may be used in certain applications in place of Hot Mirrors with the advantage of greater efficiency in transmitting the infrared to avoid the infrared ray interfere the electron signal.,Application ：,CCD Camera,Scanner,Military Equipment,TV Overhead Projector,Photo Copies,Movie Projector,Dental Illumination,Cold Mirror for Heat Transmittance,51,光学薄膜基本原理与应用课件,Hot Mirrors (Heat Reflecting Mirrors) are used in systems to remove heat(infrared) from a source of continuous radiation. It reflects infrared radiationwhile transmitting visible light to shield equipment or people from harmfulheat.,Application：,Medical Light Source,Fiber Optic Light,TV Overhead Projector,Hot Mirror for Heat Reflection,52,光学薄膜基本原理与应用课件,Long Pass Filter(,=450nm,500nm,Design structure (1/2H 1L 1/2H)10,53,光学薄膜基本原理与应用课件,Short Pass Filter(,=650nm,600nm,),Design structure (1/2L 1H 1/2L)10,54,光学薄膜基本原理与应用课件,IR Broad Band Edge Filter,55,光学薄膜基本原理与应用课件,FIR Long Pass Filter,56,光学薄膜基本原理与应用课件,IR Band Pass Filter,57,光学薄膜基本原理与应用课件,58,光学薄膜基本原理与应用课件,